Laser triangular displacement sensor and correction method of non-linear errors of laser triangular displacement sensor

Abstract

The invention discloses a laser triangular displacement sensor and a correction method of the non-linear errors of the laser triangular displacement sensor, belonging to the technical field of photoelectric measurement. The laser triangular displacement sensor comprises a semiconductor laser device, a focusing lens set, a receiving lens set, a photoelectric detector and a signal processing circuit, wherein the semiconductor laser device and the focusing lens set are coaxial, and the semiconductor laser device, the focusing lens set and a detected target are arrayed in sequence to commonly form a transmitting terminal; the receiving lens set and the photoelectric detector are arrayed in sequence; and the signal processing circuit is connected with the photoelectric detector and is used for processing an electric signal received by the photoelectric detector to obtain displacement of the detected target. The laser triangular displacement sensor provided by the invention has very high displacement measurement precision; the displacement of a common scattering object can be measured and the displacement of a mirror surface reflection object can be measured; meanwhile, in the receiving lens set, a lens is subjected to inclination or eccentric treatment and the non-linear errors are corrected based on a principle; and an economical and effective method is provided for improving a problem that the resolution ratio is not uniform.

Description

technical field [0001] The invention relates to a laser triangular displacement sensor and a method for correcting nonlinear errors thereof, belonging to the technical field of photoelectric measurement. Background technique [0002] The displacement sensor based on the principle of laser triangulation has obvious advantages such as non-contact, high precision and high reliability. At present, many domestic explorations have been made on laser triangulation ranging methods, such as Chinese patents CN201180015367.5, CN200610149518.7 and CN200820151430.3, all of which adopt the method of irradiating the surface of the vertical object and receiving it from the side to measure the surface scattering characteristics. The displacement of a good object can be accurately measured, while the displacement of an object with strong specular reflection cannot be accurately measured. [0003] In the traditional laser triangulation method, the position change of the center of the light sp...

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Problems solved by technology

[0005] In order to solve the above technical problems, the present invention proposes a simple and easy-to-implement laser triangular displacement sensor and its nonlinear error correction method, which can correct the problem of uneven resolution in principle without increasing manufacturing and assembly costs

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