Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated

A technology of micro-electromechanical systems and drive lines, applied in the direction of electrostatic relays/electro-adhesion relays, circuits, relays, etc., can solve the problems of high power consumption of semiconductor switches, affecting large-scale applications, and large volume, so as to increase additional costs and process The effect of better compatibility and simple operation

Inactive Publication Date: 2017-02-01
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Mechanical switches have excellent radio frequency performance, but are bulky, cumbersome, and costly, which affects their large-scale application...

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  • Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated

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Embodiment Construction

[0024] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0025] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element refe...

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Abstract

The invention puts forward a capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated. The switch comprises a coplanar waveguide, anchor areas, crane leg beams, drive electrodes, a central polar plate, and drive lines. The anchor areas are disposed on ground lines of the coplanar waveguide. The crane leg beams are connected with the anchor areas at the two sides and the drive electrodes in the middle respectively. The drive electrodes are connected with the central polar plate through short straight beams. The drive electrodes consist of upper drive electrodes and lower drive electrodes. The drive lines are connected with the lower drive electrodes respectively. When a direct voltage is loaded on the drive lines, an electrostatic force is provided to pull the upper drive electrodes down so that the upper drive electrodes and the lower drive electrodes fit together to turn off the switch. By separating signal lines from the drive lines, the insertion loss is reduced under the condition of same driving voltage, and the performance of the switch is improved.

Description

technical field [0001] The invention relates to the technical field of radio frequency switches, in particular to a capacitive radio frequency micro-electromechanical system switch in which signal lines and driving lines are separated. Background technique [0002] RF MEMS switch RF MEMS is a tiny semiconductor device that uses movable mechanical parts to control the on and off of radio frequency signals. In radio frequency communication systems and automatic test systems, it is mainly used to switch signal paths and control the system switch state. [0003] Traditional radio frequency switches mostly use mechanical switches or semiconductor switches. Mechanical switches have excellent radio frequency performance, but are bulky, cumbersome, and costly, which affects their large-scale application; semiconductor switches consume a lot of power and lose a lot when the signal frequency is high, so they are not suitable for high-frequency systems. Contents of the invention ...

Claims

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Application Information

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IPC IPC(8): H01H59/00
CPCH01H59/0009
Inventor 赵嘉昊李沐华尤政
Owner TSINGHUA UNIV
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