Device and method for measurement of aspheric compensator transmission wavefront equation
A technology of measuring device and measuring method, which is applied in the field of optical detection, can solve problems such as aspheric deviation from the design value and the influence of the optical system, and achieve the effects of low cost, high measurement accuracy and avoiding serious influence
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[0021] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0022] see figure 1 , figure 1 Shows the measurement device of the transmitted wavefront equation of the aspheric compensator according to the embodiment of the present invention, the measurement device includes: a phase-shifting interferometer, a ranging interferometer and a reference spherical component; wherein,
[0023] Phase-shifting interferometer includes: frequency-stabilized laser S1, collimating beam expander system S2, beam splitting prism S3, converging mirror group S4, phase-shifting reference surface S5, imaging mirror S10, detector S11 and image acquisition unit S12;
[0024] The reference sphere assembly includes: reference sphere S7, clamping mechanism S8, multi-dimensional adjustment table S9 and six-di...
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