Terahertz wave polarization beam splitter of silicon array structure

Abstract

The invention discloses a terahertz wave polarization beam splitter of a silicon array structure. The beam splitter comprises a substrate layer, a central rectangular silicon waveguide, a first long rectangular silicon waveguide on the left, a second long rectangular silicon waveguide on the left, a third long rectangular silicon waveguide on the left, a first short rectangular silicon waveguide in the middle, a second short rectangular silicon waveguide in the middle, a third short rectangular silicon waveguide in the middle, a first long rectangular silicon waveguide in a lower portion, a second long rectangular silicon waveguide in the lower portion, a first long rectangular silicon waveguide in the right, an inverted L-shaped silicon waveguide, a second long rectangular silicon waveguide in the right, a L-shaped silicon waveguide, a signal input terminal, a first signal output terminal and a second signal output terminal. A signal is input from a signal input terminal. The first signal output terminal outputs a TE wave and the second signal output terminal outputs a TM wave so as to acquire polarization and beam splitting performance. The beam splitter possesses advantages that the structure is simple; a beam splitting rate is high; the size is small; cost is low; and integration is easy to perform and so on.

Description

technical field [0001] The invention relates to a terahertz wave beam splitter, in particular to a terahertz wave polarization beam splitter with a silicon array structure. Background technique [0002] In recent years, the terahertz wave between the mature millimeter wave and infrared light on the electromagnetic spectrum is undoubtedly a new research field. The frequency of terahertz wave is 0.1-10THz, and the wavelength is 30μm-3mm. For a long time, due to the lack of effective terahertz wave generation and detection methods, compared with traditional microwave technology and optical technology, people have little understanding of the nature of electromagnetic radiation in this band, so that this band has become the terahertz wave in the electromagnetic spectrum. void. With the breakthrough of terahertz radiation source and detection technology, the unique and superior characteristics of terahertz have been discovered and have shown great application prospects in materi...

AI Technical Summary

Problems solved by technology

However, most of the existing terahertz wave polarization beam splitters have many shortcomings such as complex structure, low polarization beam splitting efficiency, and high cost. Therefore, research on simple structure, high polarization beam splitting efficiency, low cost, small size, and adjustable performance Terahertz wave polarizing beam splitter is of great significance

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