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A temperature control device that directly heats the calibrated vacuum gauge in the vacuum chamber

A technology of temperature control device and vacuum gauge, applied in the direction of temperature control, non-electric variable control, control/regulation system, etc., can solve the problems of high heating power consumption, poor temperature uniformity and stability of vacuum chamber, etc., to improve accuracy , High temperature uniformity and stability, the effect of ensuring thermal uniformity and stability

Active Publication Date: 2018-04-10
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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AI Technical Summary

Problems solved by technology

For the temperature control system of the existing vacuum system, the heating method is mainly to wind the outside of the vacuum chamber of the vacuum system or heat the heating tube for heating. The heating power consumption is high, and the heating temperature generally does not exceed 200 ° C. Some systems also need to be equipped with a water circulation cooling system. , the temperature uniformity and stability inside the vacuum chamber are poor

Method used

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  • A temperature control device that directly heats the calibrated vacuum gauge in the vacuum chamber
  • A temperature control device that directly heats the calibrated vacuum gauge in the vacuum chamber
  • A temperature control device that directly heats the calibrated vacuum gauge in the vacuum chamber

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Embodiment 1

[0028] Such as Figure 1~2 As shown, a temperature control device that directly heats the calibrated vacuum gauge in the vacuum chamber, the temperature control device mainly includes a block heating unit 12, a temperature sensor 11, an electric control unit, a heating fixture and a heating fixture base 13 ;

[0029] Wherein, the heating fixture is composed of a concave heating block 14 and a convex heating block 15; the concave heating block 14 and the convex heating block 15 are both shaped column structures, and a semicircle is processed on one side of the concave heating block 14 shaped groove, a semicircular protrusion is processed on one side of the convex heating block 15;

[0030] The block heating unit 12 is two pieces, which are closely connected with the concave heating block 14 and the convex heating block 15 of the heating fixture respectively; The lower concave surface of the heating block 14 is arranged opposite to the upper convex surface of the convex heatin...

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Abstract

The invention discloses a temperature control device used for directly heating a vacuum gauge to be calibrated in a vacuum chamber and belongs to the field of high vacuum metering calibration. The temperature control device mainly comprises a block-shaped heating unit, a temperature sensor, an electric control unit, a heating clamp and a heating clamp pedestal, wherein the temperature control device can be used for directly heating the vacuum gauge to be calibrated in the vacuum chamber, the temperature control device is large in heating temperature range and low in heating efficiency, geometric dimensions of a heating area of the heating clamp conform with two line field equipotential line distribution, temperature homogeneity can be realized, excellent temperature stability can be achieved due to vacuum insulation effect, no water circulation cooling system is needed, only small effects can be exerted on temperature of other parts of the vacuum chamber, and a foundation is provided for accurate calibration of a high vacuum measuring range vacuum gauge at high temperature.

Description

technical field [0001] The invention relates to a temperature control device, in particular to a temperature control device directly to a vacuum degree greater than or equal to 10 -5 Pa, a temperature control device heated by a calibrated vacuum gauge in a high-temperature high-vacuum calibration system with a temperature greater than or equal to 100°C, belonging to the field of high-vacuum measurement calibration. Background technique [0002] Vacuum measurement requires accurate and uniform vacuum value, and in order to meet this requirement, the vacuum gauge must be calibrated regularly. Routine vacuum gauge calibration is mostly carried out at laboratory temperature (23°C). However, the actual use environment of the vacuum gauge is varied. If the influence of temperature on the calibration results of the vacuum gauge is not considered, it will lead to inaccurate vacuum measurement. Therefore, it is an important research work to study the influence of temperature on the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D23/20
CPCG05D23/20
Inventor 袁征难孙雯君成永军习振华
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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