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Three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser

A technology of three-dimensional shape and measurement method, which is applied in the direction of measuring device, optical device, instrument, etc., to achieve the effect of improving measurement accuracy, good speckle suppression effect, and realistic picture

Inactive Publication Date: 2017-02-22
TIANJIN UNIV
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Problems solved by technology

[0004] Aiming at the technical problems existing in the prior art, the present invention provides a three-dimensional topography measurement method based on broad-spectrum laser suppression of speckle. The method uses the laser in a coherent collapsed state to output a wide-spectrum light source for accurate three-dimensional surface topography measurement, and then From the perspective of hardware, it realizes effective suppression of speckle and solves the technical problem of filtering out high-frequency useful information in images, improves image clarity, and has a wide range of applications.

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  • Three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser
  • Three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser
  • Three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser

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[0035] Below in conjunction with accompanying drawing, the present invention is described in detail:

[0036] Such as figure 1 As shown, the present invention provides a three-dimensional shape measurement method based on broad-spectrum laser suppression of speckle, including the following steps:

[0037] As shown in 101 and 102 in the figure, the scanning step is performed by outputting a broad-spectrum laser source to the surface of the measured object;

[0038] As shown in 103 in the figure, the step of extracting the pixel coordinates of the center point of the light spot of the scanned image; the light spot image acquired by the scanning system in the present invention is not a single pixel, so the pixel coordinates of the center point of the light spot need to be extracted. The skeleton of the spot is used as the frame of the spot, and the normal vector of the spot under the frame is obtained, and then the pixel coordinates of the center point are obtained by using the ...

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Abstract

The invention discloses a three-dimensional morphology measurement method for inhibiting speckles on the basis of wide-spectrum laser. The method comprises the following steps: a step of outputting a wide-spectrum laser source to the surface of a measured object for scanning; a step of extracting center point pixel coordinates of light spots of scanned images; and a step of converting the center point pixel coordinates to obtain three-dimensional point-cloud data of the measured object. According to the method, the wide-spectrum light source is output when a laser is at a coherent collapse state, for carrying out accurate three-dimensional surface morphology measurement, such that the speckles are effectively inhibited from a hardware perspective, the technical problem that high-frequency useful information in the images are filtered is solved, the image sharpness is improved, and the application field is wide.

Description

technical field [0001] The invention relates to the technical field of photoelectric measurement and detection, in particular to a three-dimensional shape measurement method based on broad-spectrum laser suppression of speckles. Background technique [0002] Due to the constraints of environmental temperature, processing method, machine tool precision and other factors, the workpiece size may be out of tolerance in all aspects of workpiece production. Therefore, it is of great significance to realize the closed-loop control of workpiece production and improve the product qualification rate to accurately measure the three-dimensional topography of the workpiece surface, remove unqualified workpieces in time, and feed back the defect information to the upstream foundry. Among them, for the measurement of flexible or inaccessible objects, non-contact measurement technology is widely used due to its significant advantages such as high precision, high efficiency, and surface non-...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 张瑞峰赵倩楠
Owner TIANJIN UNIV
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