Semiconductor device and optical coupling device
A technology for semiconductors and light-emitting parts, which is applied to semiconductor devices, semiconductor/solid-state device parts, electric solid-state devices, etc., and can solve problems such as different thermal expansion coefficients and light-emitting chip peeling.
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no. 1 Embodiment approach
[0020] Figure 1A is a perspective view of the optical coupling device 1 of the present embodiment, Figure 1B yes Figure 1A Sectional view of line A-A. The optical coupling device 1 of the present embodiment includes: a first bonding pad 3 , a second bonding pad 4 , and a third bonding pad 5 respectively arranged separately on a substrate 2 ; and a light receiving chip provided on the first bonding pad 3 . 6. The light-emitting chip 7 arranged on the light-receiving chip 6, the first MOSFET (Metal Oxide Semiconductor Field Effect Transistor, Metal Oxide Semiconductor Field Effect Transistor) 8 arranged on the second pad 4, and the first MOSFET (Metal Oxide Semiconductor Field Effect Transistor) arranged on the third pad 5 The upper second MOSFET9, the gel-like silicone 10 covering the surface of the light-emitting chip 7, and the resin part 11 covering the surface of the silicone 10. The first MOSFET 8 and the second MOSFET 9 are power semiconductor elements such as IGBT (I...
no. 2 Embodiment approach
[0044] In the second embodiment, the rubber-like silicone 10 is used to prevent the peeling of the light emitting chip 7 .
[0045] The optical coupling device 1 of the second embodiment has the same configuration as that of FIG. 1 . Figure 4 is a schematic cross-sectional view of the periphery of the light-emitting chip 7 and the light-receiving chip 6 . Such as Figure 4 As shown, the surface of the light-emitting chip 7 stacked on the light-receiving chip 6 and part of the bonding wire 16 connected to the light-emitting chip 7 and the light-receiving chip 6 are covered with rubber-like silicone 10 . The silicone 10 is covered with a resin portion 11 including epoxy resin or the like. Figure 5 It is an enlarged cross-sectional view schematically showing the vicinity of the interface between the rubber-like silicone 10 and the resin portion 11 .
[0046] The rubber-like silicone 10 of the present embodiment has different thicknesses on the upper surface side and the side...
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Abstract
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