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A planetary rotary shelf device for nano-coating equipment
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A coating equipment and planetary technology, which is applied in the field of nano-coating equipment planetary rotary shelf device, can solve the problems of inconsistent mass production quality and achieve uniform density of chemical monomers
Active Publication Date: 2018-08-10
JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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Problems solved by technology
This leads to the phenomenon that the thickness of the polymer coating on the surface of the coated workpiece placed in these areas is thicker, while the thickness of the coating in other areas is thinner, resulting in inconsistent quality in mass production
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Embodiment 1
[0017] Such as figure 1 As shown, a planetary rotary shelf device for nano-coating equipment, including a chamber, the top of the chamber 3 is connected to the suction port 2, the suction port is connected to the vacuum pump 1, the intake valve 4 is connected to the chamber 3 through the intake pipeline, and the feeding valve 5 is connected to the chamber 3 through the feeding pipeline, and the radio frequency power supply 12 is connected to the electrodes in the chamber 3 through wires. A hollow tube 10 is installed on the central axis of the chamber, and a through hole is opened on the hollow tube. The hollow tube The upper end is connected to the air extraction port, and a rotating motor 9 is installed at the bottom of the chamber, and a planetary rotary shelf is installed on the rotating motor;
[0018] The planetary revolving shelf includes a rotating shaft and a rotating rack 11, the rotating shaft is connected to a rotating motor, the rotating shaft is coaxial with the ...
Embodiment 2
[0025] The structure and connection relationship of each part of the planetary rotary shelf device of a nano-coating equipment in this embodiment are the same as those in Embodiment 1, and the different technical parameters are:
[0026] There are 4 planetary rotation shafts and 3 shelves.
[0027] The chamber 3 has a volume of 600L and is made of aluminum alloy.
[0028] The power of vacuum pump 1 is 10KW, and the pumping speed is 700m 3 / h.
[0029] The power of the rotating motor 6 is 400W, and the power of the radio frequency power supply is 600W.
Embodiment 3
[0031] The structure and connection relationship of each part of a nano-coating equipment planetary rotary shelf device described in this embodiment are the same as those in Embodiment 1, and the different technical parameters are:
[0032] There are 4 planetary rotation shafts and 5 shelves.
[0033] The cavity volume of chamber 3 is 1200L, and the material is stainless steel.
[0034] The power of vacuum pump 1 is 20KW, and the pumping speed is 900m 3 / h.
[0035] The power of the rotary motor 6 is 800W, and the power of the radio frequency power supply is 900W.
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Abstract
The invention relates to a planetary rotary shelf device for nano-coating equipment, which belongs to the technical field of vacuum coating. In this device, the top of the chamber is connected to the air extraction port, a hollow tube is installed at the center axis of the chamber, the upper end of the hollow tube is connected to the air extraction port, a rotating motor is installed at the bottom of the chamber, and a planetary rotary shelf is installed on the rotating motor; In the planetary rotary shelf, the rotating shaft is connected to the rotating motor, and the rotating shaft is coaxial with the hollow tube. The rotating rack is fixed on the rotating shaft. At least two planetary rotating shafts are symmetrically arranged on the rotating rack. At least one layer of storage table, on which workpieces to be processed are placed. The beneficial effects of the present invention: during the coating process, the revolution and rotation of the planetary rotary shelf continue double rotation, avoiding the uneven coating thickness of the workpiece in the fixed area caused by the uneven gas density of the chemical monomers in each area. At the same time, the rotation of the planetary rotary shelf is also conducive to fully mixing the chemical monomer gas entering the chamber.
Description
technical field [0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a planetary rotary shelf device for nano-coating equipment. Background technique [0002] As an effective method to improve the surface properties of materials, plasma coating is widely used in aerospace, automobile manufacturing, machinery heavy industry and hardware tool manufacturing and other fields. During the plasma coating process, the air in the chamber of the coating equipment needs to be pumped out to maintain a low pressure state, and at the same time, the process gas and chemical monomer gas need to be introduced for the reaction to form a polymer coating. Since the entire plasma coating process requires continuous pumping, and the positions of the gas inlet, gas inlet, and feeding port are fixed, the chemical monomer gas has a tendency to diffuse toward the gas outlet, resulting in the chemical monomer gas in the feeding port area and The density ...
Claims
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Application Information
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