Digital integrated circuit standard sample chip

Abstract

The invention discloses a digital integrated circuit standard sample chip. The digital integrated circuit standard sample chip comprises a signal conversion circuit, an analog-to-digital conversion circuit and an MCU which are connected with one another sequentially; the signal input end of the signal conversion circuit is connected with the voltage or current signal end of an integrated circuit test system; the input end of the MCU is connected with the output ends of the integrated circuit test system and a traceability module; the output end of the MCU is connected with the control input end of the signal conversion circuit; the input end of the traceability module is connected with the voltage or current signal end; and the MCU controls the operating mode and measurement mode type of the standard sample chip according to mode control signals inputted by the integrated circuit test system and is used measuring and calibrating voltage or current. The digital integrated circuit standard sample chip can be directly used for the on-line measurement and calibration of voltage-increase voltage measurement, voltage-increase current measurement, current-increase current measurement and current-increase voltage measurement of the integrated circuit test system and displaying measurement results in real time; and the digital integrated circuit standard sample chip has a traceability function and can ensure the accuracy of calibration results.

Description

technical field [0001] The invention relates to the technical field of microelectronic measurement, in particular to a digital integrated circuit standard sample used for online calibration of an integrated circuit test system. Background technique [0002] The method and way of traceability and transmission of microelectronic value have always been the key to hinder the development of microelectronic metrology verification, calibration and comparison. The standard sample is a good way to realize the traceability and transmission of the quantity value, which has many advantages such as convenient portability, simple calibration process, and on-site calibration. There are two main types of standard samples currently used in the field of microelectronic metrology. One is to investigate the repeatability and stability of the standard sample through a series of screening and periodic inspection, and select an integrated circuit whose value meets a certain uncertainty requiremen...

AI Technical Summary

Problems solved by technology

These two kinds of standard samples need to be fixed before use, and the fixed value takes a long period, and the parameter range without fixed value cannot be used for calibration, which lacks flexibility, so it is used in the test system has certain limitations when calibrating the full scale of the

At the same time, because the circuit used for the calibration of the standard sample is not exactly the same as the circuit used for the calibration of the test system, it will cause certain errors during calibration

In addition, there is currently a lack of standard samples for online calibration of digital integrated circuit test systems, so it is very necessary to develop such standard samples

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