Production and use of phosphine gas and nitrogen dilution system
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 黄建
- Publication Date
- 2019-07-09
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Abstract
Description
[0001] (1) Technical field
[0002] The invention relates to a device for producing and using phosphine gas and a dilution device, in particular to a phosphine generator and a nitrogen dilution auxiliary system.
[0003] (2) Background technology
[0004] At present, when the phosphine generators on the market are used, carbon dioxide gas is needed to dilute the concentration of the generated phosphine gas, so as to achieve the purpose of safe production.
[0005] (3) Contents of the invention
[0006] The technical problem to be solved by the present invention is to provide an easy-to-produce, cheap, non-combustible gas to A method of diluting the concentration of phosphine gas.
[0007] A kind of production of phosphine gas and nitrogen dilution system of the present invention, the production of described phosphine gas and use and nitrogen dilution system comprise power supply, phosphine generator, nitrogen source (various nitrogen production machine, small nitrogen genera...