Ti-based LTCC microwave dielectric ceramic material and preparation method thereof
A technology of microwave dielectric ceramics and base materials, which is applied in the field of Ti-based LTCC microwave dielectric ceramic materials and its preparation, can solve the problems of high sintering temperature, unsatisfactory cooling effect, incompatibility with LTCC technology, etc., and achieve the resonant frequency temperature coefficient The effect of low temperature sintering
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[0022] Below in conjunction with accompanying drawing and specific embodiment, the present invention is described in further detail, and process method is as follows: figure 1 shown.
[0023] Step 1, according to the molar ratio MgCO 3 :Co 2 o 3 : TiO 2 =1.9:0.05:1 weighing configuration (Mg 0.95 co 0.05 ) 2 TiO 4 ; According to the molar ratio Li 2 CO 3 : TiO 2 =1:1 weighing configuration Li 2 TiO 3 ; will prepare (Mg 0.95 co 0.05 ) 2 TiO 4 and Li 2 TiO 3 Perform ball milling once to mix the materials evenly, and then dry them separately for later use.
[0024] Step 2, the (Mg 0.95 co 0.05 ) 2 TiO 4 After sieving the dried material, put it into a crucible for compaction, raise the temperature up to 1200°C at a rate of 2°C / min for pre-burning, keep the temperature for 3 hours, and cool down with the furnace to obtain (Mg 0.95 co 0.05 ) 2 TiO 4 Pre-fired material; the Li obtained in step 1 2 TiO 3 After the drying material is sieved, it is put into ...
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