Structure detection confocal microscopy imaging method and apparatus based on spatial light modulator

A technology of spatial light modulator and confocal microscopy imaging, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems of long occupation time and low image acquisition rate, and achieve the effect of improving the imaging rate.

Active Publication Date: 2017-05-31
HARBIN INST OF TECH
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Problems solved by technology

[0007] The deficiencies of the existing structure detection technology described in the above-mentioned documents and their references are: the CCD is affected by

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  • Structure detection confocal microscopy imaging method and apparatus based on spatial light modulator
  • Structure detection confocal microscopy imaging method and apparatus based on spatial light modulator
  • Structure detection confocal microscopy imaging method and apparatus based on spatial light modulator

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings.

[0026] Depend on figure 1 A structure detection confocal microscopy imaging method based on a spatial light modulator is shown. The beam emitted by the laser 1 is converged by the first lens 2, and the converged beam is transmitted through the beam splitter 3 and focused to a point on the sample 4 to be tested. The reflected light of the point returns from the original optical path, and is reflected to the detection optical path by the beam splitter 3. The modulated reflected light of the sample is converged by the second lens 6 to the photodetector 7, received and converted into an electrical signal output, and the gray value of the sample at this point can be obtained. Wherein, the modulation surface of the spatial light modulator produces an image conforming to the description of the structure detection function, and the light intensity distribution of the reflecte...

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Abstract

The invention provides a structure detection confocal microscopy imaging method and apparatus based on a spatial light modulator, and mainly solves problems of low image acquisition rate and long image processing time of conventional confocal microscopy imaging. According to the method, a structure detection method is introduced to a confocal scanning microscopic system, a structure detection function is simulated by employing the spatial light modulator, detection light spots are modulated, the light intensity after modulation is measured by employing a photoelectric detector, a light intensity value corresponding to a sampling point of a to-be-measured sample is obtained, and three-dimensional imaging of the to-be-measured sample can be realized with the combination of a scanning mechanism of the confocal microscopy system. The invention also provides a measuring device applicable to the method, structure detection is realized through the transmission type spatial light modulator and the photoelectric detector, the resolution is high, and the imaging speed is high.

Description

technical field [0001] The invention belongs to the field of confocal microscopic imaging, and in particular relates to a method and a device for realizing structure detection super-resolution imaging in a confocal microscopic system by using a spatial light modulator. Background technique [0002] Optical microscopy is a long-established and important non-destructive technique widely used in fields such as biology and materials science. Confocal microscopic measurement technology is a three-dimensional optical microscopy technology suitable for micron and submicron scale measurement. The tomographic capabilities of reflective confocal microscopy systems make them important in the field of 3D imaging. [0003] In the mid-to-late 1950s, the confocal microscope was invented by Minsky. In 1977, C.J.R. Sheppard and A.Choudhury first clarified that the confocal microscope system under the action of the dot pinhole mask, at the expense of the field of view, the lateral resolution...

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Application Information

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IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 倪赫邹丽敏张鹏郭清源周梦姣丁雪梅
Owner HARBIN INST OF TECH
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