Silicon-Based Unknown Frequency Slit-Coupled Indirect Millimeter-Wave Phase Detector
A phase detector, millimeter-wave technology, applied in the direction of frequency measurement device, frequency to phase shift conversion, phase angle between voltage and current, etc., can solve the problems of high cost, complex structure, low detection efficiency, etc., to improve efficiency effect
Active Publication Date: 2019-03-05
SOUTHEAST UNIV
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Millimeter wave signal is a high-frequency signal between microwave signal and optical signal. Frequency and phase are two very important parameters of millimeter wave signal. Millimeter wave phase measurement technology and frequency measurement technology are widely used in military, aerospace and The field of communication has a very wide range of applications. Generally speaking, the phase measurement of millimeter waves needs to know its frequency, so as to determine the frequency of the reference signal. However, in the case of unknown frequencies, it is necessary to measure the phase of millimeter waves first frequency, and then measure the phase of the millimeter wave, which reveals the integration problem of the frequency measurement and phase measurement of the millimeter wave. The existing millimeter wave phase detector at an unknown frequency is not only complex in structure, high in cost, but also reliable Not high, low detection efficiency
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[0022] specific implementation plan
[0023] The silicon-based unknown-frequency slot-coupled indirect millimeter-wave phase detector of the present invention is made on a high-resistance Si substrate 6, and consists of a coplanar waveguide 3, a No. 1 slot coupling structure 5-1, and a No. 2 slot coupling structure 5. -2, No. 3 slot coupling structure 5-3, No. 4 slot coupling structure 5-4, phase shifter 4, No. 1 SPDT switch 19, No. 2 SPDT switch 20, a Wilkinson power divider, three Composed of Wilkinson power combiner and five indirect thermoelectric power sensors.
[0024] SPDT switch 19 is composed of coplanar waveguide 3, anchor region 22, Si 3 N 4The dielectric layer 23, the switch pull-down electrode plate 24 and the switch beam 21 are composed, the coplanar waveguide 3 is connected to the anchor area 22, and the anchor area 22 is connected to the switch beam 21 on two different branches, one of which is connected to the indirect Thermoelectric power sensor, another b...
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A silicon-based unknown-frequency slot-coupling indirect millimeter wave phase detector provided by the invention comprises a coplanar waveguide, slot coupling structures, a phase shifter, single-pole double-throw switches, a Wilkinson power divider, Wilkinson power combiners and indirect type thermoelectric type power sensors, the overall structure is manufactured based on a high-resistance Si substrate, four slot coupling structures are arranged in total, the two slot coupling structures at the upper side realize frequency measurement of signals, the two slot coupling structures at the lower side realize phase measurement of signals, and the phase shifter is arranged between front and rear slots; each of the Wilkinson power divider and the Wilkinson power combiners comprises a coplanar waveguide, an asymmetric coplanar strip line and a resistor; each of the indirect type thermoelectric type power sensors mainly comprises a coplanar waveguide, two resistors and a thermopile, and the thermopile is formed by two different semiconductor arms in a cascaded manner, and can convert heat emitted by a terminal resistor into thermoelectric force. The structures easily and effectively realize phase measurement of millimeter waves at an unknown frequency.
Description
technical field [0001] The invention provides a silicon-based unknown-frequency slot-coupled indirect millimeter-wave phase detector, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] In today's era of rapid development of information technology, people's research on signal measurement and processing is becoming more and more profound. From the previous low-frequency signals to high-frequency microwave signals to higher-frequency optical signals, the difficulty of measuring these signals is also increasing. getting bigger. Millimeter wave signal is a high-frequency signal between microwave signal and optical signal. Frequency and phase are two very important parameters of millimeter wave signal. Millimeter wave phase measurement technology and frequency measurement technology are widely used in military, aerospace and The field of communication has a very wide range of applications. Generally speaking, the phase m...
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IPC IPC(8): G01R25/04G01R23/12G01R15/00
CPCG01R15/00G01R23/12G01R25/04
Inventor 廖小平褚晨蕾
Owner SOUTHEAST UNIV