Niobium nitride superconducting quantum interference device (SQUID), preparation method and parameter post-processing approach

A technology of niobium nitride and niobium nitride materials, which is applied in the manufacture/processing of superconductor devices, superconducting devices, devices containing a node of different materials, etc., which can solve the difficulty of controlling the thickness of the insulating layer and the efficiency of device preparation Low-level problems, to achieve the effect of improving preparation efficiency and consistency

Active Publication Date: 2017-06-09
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the object of the present invention is to provide a niobium nitride SQUID device, a preparation method and a parameter post-proce

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  • Niobium nitride superconducting quantum interference device (SQUID), preparation method and parameter post-processing approach
  • Niobium nitride superconducting quantum interference device (SQUID), preparation method and parameter post-processing approach
  • Niobium nitride superconducting quantum interference device (SQUID), preparation method and parameter post-processing approach

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Embodiment Construction

[0048] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0049] Please refer to attached picture. It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be change...

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Abstract

The present invention provides a niobium nitride SQUID, a preparation method and a parameter post-processing approach. The preparation method comprises the steps of firstly depositing a niobium nitride-insulating layer-niobium nitride three-layer thin film structure on a substrate, and then preparing a superconducting ring and a bottom electrode structure of the SQUID; then preparing a plurality of parallel Josephson junctions; and then depositing an insulating thin film on the surface of the device, and holing on the surface of each Josephson junction and the surface of the bottom electrode to lead out a top electrode in the subsequent step; and then depositing a metal thin film and preparing a metal bypass resistor; and finally depositing a niobium nitride thin film and preparing a comb-shaped top electrode. By the preparation method and the parameter post-processing method of the present invention, if the numerical values of a critical current and the bypass resistor of the NbN SQUID are discovered to have larger deviation with the design values by a test, the post processing can be carried out on the device, so that the numerical values of the critical current and the bypass resistor approach the design numerical values, and the consistency of the device is improved.

Description

technical field [0001] The invention belongs to the field of superconducting quantum interference devices (SQUID), and relates to a niobium nitride superconducting quantum interference device, in particular to a niobium nitride SQUID device, a preparation method and a parameter post-processing method. Background technique [0002] The principle of superconducting quantum interference device (SQUID) is magnetic flux quantization and Josephson effect. Structurally, SQUID device is composed of superconducting Josephson junction and superconducting ring. This device can convert the small magnetic field change induced by the device into Therefore, SQUID is equivalent to a magnetic field-voltage conversion device, which is the most sensitive sensor for measuring magnetic field so far. At the temperature of liquid helium (4.2K), the magnetic flux sensitivity of low-temperature superconducting SQUID devices made of low-temperature superconducting materials (such as Nb or NbN) is usu...

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Application Information

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IPC IPC(8): H01L39/02H01L39/22H01L39/12H01L39/24
CPCH10N60/805H10N60/85H10N60/12H10N60/0241H10N60/0912
Inventor 王会武刘全胜张栖瑜应利良王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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