Evaporation source, evaporation device and evaporation method
A vapor deposition source and vapor deposition technology, which are applied in the fields of vapor deposition devices, vapor deposition, and vapor deposition sources, and can solve problems such as uneven thickness of vapor deposition films.
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[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0034] An embodiment of the present invention provides an evaporation source, such as figure 1 As shown, the evaporation crucible 10 is included, and a plurality of evaporation nozzles 20 arranged on the outlet side of the evaporation crucible 10 are included, such as figure 2 As shown, a plurality of evaporation nozzles 20 are arranged in at least one row. Such as figure 1 As shown, the interior of the evaporation crucible 10 includes an evaporation materi...
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