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Evaporation source, evaporation device and evaporation method

A vapor deposition source and vapor deposition technology, which are applied in the fields of vapor deposition devices, vapor deposition, and vapor deposition sources, and can solve problems such as uneven thickness of vapor deposition films.

Active Publication Date: 2017-06-13
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Embodiments of the present invention provide an evaporation source, an evaporation device, and an evaporation method, which can solve the problem of the evaporation of the evaporation film in different evaporation regions on the evaporation substrate in the evaporation process of the existing line evaporation source or surface evaporation source. The problem of uneven layer thickness

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  • Evaporation source, evaporation device and evaporation method
  • Evaporation source, evaporation device and evaporation method
  • Evaporation source, evaporation device and evaporation method

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Embodiment Construction

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0034] An embodiment of the present invention provides an evaporation source, such as figure 1 As shown, the evaporation crucible 10 is included, and a plurality of evaporation nozzles 20 arranged on the outlet side of the evaporation crucible 10 are included, such as figure 2 As shown, a plurality of evaporation nozzles 20 are arranged in at least one row. Such as figure 1 As shown, the interior of the evaporation crucible 10 includes an evaporation materi...

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Abstract

An embodiment of the invention provides an evaporation source, an evaporation device and an evaporation method, relates to the field of vacuum evaporation coating and can solve the problem of non-uniform evaporation coating thickness at different evaporation areas of a to-be-evaporated substrate in the process of evaporation due to existing linear or planar evaporation sources. The evaporation device comprises an evaporation crucible and multiple evaporation nozzles arranged on the outlet side of the evaporation crucible in one row at least. An evaporation material cavity is formed inside the evaporation crucible, and the side wall on the outlet side of the evaporation crucible is provided with a through cavity communicated with the evaporation material cavity; each evaporation nozzle comprises a sprayer and a moving portion fixedly connected with the sprayer, each sprayer is communicated with the evaporation material cavity through the through cavity, and each moving portion is arranged in the through cavity and can rotate in the same to enable the corresponding sprayer to be driven by the moving portion to swing.

Description

technical field [0001] The invention relates to the field of vacuum evaporation coating, in particular to an evaporation source, an evaporation device and an evaporation method. Background technique [0002] Vacuum evaporation refers to the process of condensing or depositing the material to be filmed on the surface of a low-temperature workpiece or substrate after heating, evaporating or sublimating in a vacuum environment to form a coating. In the field of organic display, the coating process of organic display devices is a key factor affecting the performance of organic display devices. [0003] For small generation lines of small and medium-sized organic display devices, point evaporation sources are usually used for evaporation, and the substrate carrying small and medium-sized organic display devices is rotated at a constant speed during the evaporation process to make the materials at different positions on the substrate evenly evaporated. For large generation lines ...

Claims

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Application Information

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IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/246
Inventor 上官荣刚王欣欣
Owner BOE TECH GRP CO LTD
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