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203results about How to "Reduce thickness difference" patented technology

Electrospinning membrane machine in warp and weft directions and application process thereof

The present invention relates to an electrospinning device for fabricating a membrane, in particular, to an electrospinning device for fabricating membrane by using spinnerets aligned in machine direction (MD) and transverse direction (TD) in a high-voltage DC electric field, and to method for using the same. In addition to producing a single-layer nanofiber membrane from a polymer composite, the electrospinning device according to the present invention can also conveniently produce a multilayer composite nanofiber membrane from more than one polymer composites. The electrospinning device comprises a control section, an electrospinning section and an ancillary section. The electrospinning section comprises a MD spinnerets set and a TD spinnerets set that are alternately arranged and moves above a membrane collecting device in a to-and-fro scanning manner so as to improve the evenness and strength of the obtained membrane. The high-voltage DC electric field is applied between the MD and TD spinnerets sets and a stainless steel conveyer belt for collecting the membrane. A polymer solution supplied to the MD and TD spinnerets sets is split into nanoflows under the action of the electric field, accumulated on the stainless steel conveyer belt to form a membrane and carried to a collecting roller to be collected.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

Method for forming a gate electrode in a semiconductor device including re-oxidation for restraining the thickness of the gate oxide

A semiconductor device and method of production are disclosed, the method including forming a preliminary gate electrode on a semiconductor substrate, the preliminary gate electrode including a gate oxide layer pattern and a conductive layer pattern stacked on the gate oxide layer pattern, and performing a re-oxidation process for curing damage of the semiconductor substrate and/or a sidewall of the conductive layer pattern, when the preliminary gate electrode is formed by forming an oxide layer on an outer surface of the preliminary gate electrode and on the semiconductor substrate, by supplying an oxygen gas and a chlorine-including gas while restraining a thickness of the gate oxide layer pattern from being increased; and the semiconductor device comprising a preliminary gate electrode formed on a semiconductor substrate, the preliminary gate electrode including a gate oxide layer pattern and a conductive layer pattern stacked on the gate oxide layer pattern, and a re-oxidized semiconductor substrate and/or a sidewall of the conductive layer pattern, with damage cured therein by supplying an oxygen gas and a chlorine-including gas while restraining a thickness of the gate oxide layer pattern from being increased.
Owner:SAMSUNG ELECTRONICS CO LTD

Method and device for uniform magnetron sputtering deposition on inner surface of axisymmetric curved member

The invention discloses a method and a device for uniform magnetron sputtering deposition on the inner surface of an axisymmetric curved member, and aims to solve the problem that energy is lost due to gravity and collision between deposition atoms and working gas during the preparation of a clad layer on the inner surface of the axisymmetric curved member according to the conventional magnetron sputtering method, so that the longer the distance from the member to a target surface is, the less deposition atoms can reach the target surface and the lower the deposition rate of the clad layer is, the thickness of the clad layer on the workpiece inner surface (member inner surface) at different latitudes is larger, and the uniformity of the clad layer is poor. The method and the device can effectively overcome defects of traditional methods, and the thickness uniformity of the clad layer on the inner surface of the axisymmetric curved member can be improved to 70% or above, so that the uniform magnetron sputtering clad layer can be formed on the workpiece inner surface. Meanwhile, the method is simple, the process is controllable, the repeatability is good, and the requirements on industrialized and large-scale preparation of uniform clad layers on inner surfaces of axisymmetric curved members can be met.
Owner:MATERIAL INST OF CHINA ACADEMY OF ENG PHYSICS

MOS device, manufacturing method of MOS device and manufacturing method of CMOS devices

The invention provides an MOS device, a manufacturing method of the MOS device and a manufacturing method of two kinds of CMOS devices. The manufacturing method of the MOS device comprises the step of providing a substrate comprising a polysilicon gate, the step of sequentially forming a middle layer, an isolation layer and a first interlayer dielectric layer on the substrate and the polysilicon gate, the step of enabling the upper surface of the first interlayer dielectric layer to be flush with the upper surface of the isolation layer, the step of removing the isolation layer on the polysilicon gate, the middle layer above the polysilicon gate and the polysilicon gate to form a groove, the step of forming a metal grid in the groove, the step of carrying out the planarization processing to enable the upper surface of the metal grid, the upper surface of the first interlayer dielectric layer, the upper surface of the isolation layer and the upper surface of the middle layer to be flush with one another, the step of removing the middle layer on the side wall of the metal grid to form a gap and the step of forming second interlayer dielectric layers on the upper surface of the first interlayer dielectric layer, the upper surface of the isolation layer, the upper surface of the gap and the upper surface of the metal grid. The thickness of the metal grid can be accurately controlled, stray capacitance can be reduced, and the performance of the device can be improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP

4H-SiC ultraviolet photoelectric detector with spherical crown structure, and preparation method

Disclosed are a 4H-SiC ultraviolet photoelectric detector with a spherical crown structure, and a preparation method. The ultraviolet photoelectric detector adopts a p-i-n structure; an N type bufferlayer and an i type absorption layer are grown on a highly-doped four-degree-off-axis double parabolic N+ type 4H-SiC substrate in sequence; an arc-shaped inclined table surface is formed on the i type absorption layer to form a spherical crown-shaped i type absorption layer surface; by adopting an injection and high-temperature annealing activation process, a P+ layer is formed on the upper surface of the spherical crown-shaped i type absorption layer; next, through a thermal oxidization method, a silicon dioxide passivation layer is grown on the surface of the P+ layer; through a photoetching process, an ICP etching process and a stripping process, a P type annular electrode window is etched in the silicon dioxide passivation layer of the P+ layer, and a P type electrode is formed by adopting a magnetron sputtering process; and the highly-doped four-degree-off-axis double parabolic N+ type 4H-SiC substrate on the back surface is etched, and an N type electrode is formed by adopting amagnetron sputtering process, so as to obtain the 4H-SiC ultraviolet photoelectric detector with the spherical crown structure.
Owner:XIAMEN UNIV

Electroplating apparatus and electroplating method thereof

The invention relates to an electroplating apparatus, which is provided for electroplating a substrate comprising a plurality of areas requiring electroplating, wherein the areas requiring electroplating are electrically insulated. The electroplating apparatus comprises an electroplating bath, a cathode fixation structure, a plurality of anodes and a voltage controller. The cathode fixation structure comprises an installation frame and a plurality of electrical conductivity fixation components. The electrical conductivity fixation components are provided for installing the substrate on the installation frame, and conducting current to the substrate. Each electroplating-required area of the substrate is provided with at least an electrical conductivity fixation component. Each anode is corresponding to an electroplating-required area of the substrate arranged on the installation frame. The voltage controller forms electrical connections with a plurality of the anodes and a plurality of the electrical conductivity fixation components. The voltage controller is provided for controlling the electrifying status of each anode and at least an electrical conductivity fixation component arranged on the electroplating-required area corresponding to the anode so as to control the voltage between each anode and the electroplating-required area corresponding to the anode. The technical scheme further provides an electroplating method for using the electroplating apparatus.
Owner:AVARY HLDG (SHENZHEN) CO LTD +1
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