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Polymeric thin film polarization method and device, polarized film, and electronic device

A polymer thin film and thin film technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, electrical components, etc., can solve the problem of low pass rate of thin film production and achieve Large-scale production, strong piezoelectric effect, and the effect of avoiding breakdown

Active Publication Date: 2017-06-20
科锐昇微系统(苏州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to overcome the technical problem of low qualified rate of existing thin film polarization production, the present invention provides a polymer thin film polarization method and device, polarized film, electronic device

Method used

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  • Polymeric thin film polarization method and device, polarized film, and electronic device
  • Polymeric thin film polarization method and device, polarized film, and electronic device
  • Polymeric thin film polarization method and device, polarized film, and electronic device

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Experimental program
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Embodiment 1

[0036] like figure 1 Shown, a polymer film polarization method, comprising:

[0037] Step S1: providing a polymer film to be polarized and making the film potential zero;

[0038] Step S2: providing a high electric field and a low electric field above the polymer film to be polarized, the potential of the high electric field is higher than the potential of the low electric field;

[0039] Step S3: using X-rays to ionize the ambient gas above the polymer film to be polarized and depositing it on the surface of the polymer film through the low electric field under the action of the high electric field, so that The electric field inside the film along the thickness direction of the film completes the polarization of the polymer film.

[0040] A method for polarizing a polymer film provided by the present invention uses X-rays to ionize the ambient gas above the polymer film to be polarized and passes through the low electric field to deposit on the polymer film under the action...

Embodiment 2

[0053] The present invention also provides a polarized film, which is prepared by the polymer film polarized method provided in Example 1. As described in Embodiment 1, the polarized film provided by the present invention has a strong piezoelectric effect and a long service life. And because the polarized film is a polymer film, such as a ferroelectric polymer film, which is polarized after being formed in situ on the surface of the substrate, the thickness of the polarized film is less than 9 μm, reducing the overall thickness of the device including this polarized film , which can better meet the needs of the market.

Embodiment 3

[0055]The present invention also provides an electronic device, which includes a base and a polarizing film formed on the base in situ. Since the polarized film has a strong piezoelectric effect, the application of the electronic device is effectively broadened and its competitiveness is enhanced. Electronic devices with piezoelectric effect are widely used in the field of sensors, and will be applied to communication devices such as mobile phones and tablet computers. Since the thickness of the polarizing film is less than 9 μm, it is more suitable for the current trend of light and thin communication equipment.

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Abstract

The invention relates to a polymeric thin film polarization method and device, a polarized film, and an electronic device. The polymeric thin film polarization method and device are characterized in that the ambient gas above the polymeric thin film to be polarized by means of X rays and passes through a low electric field to be deposited on the surface of the polymeric thin film under the effect of a high electric field, so that an in-film electric field along the thickness direction of the thin film is formed in the polymeric thin film, and the polarization of the polymeric thin film can be completed. The production qualified rate of a polarized film can be effectively improved, and the environmental pollution is reduced. The invention further provides a polarized film which is prepared by means of the polymeric thin film polarization method, so that the piezoelectric effect is high and the service life is prolonged. The invention further provides an electronic device, a base and an original position are formed on the polarized film on the base, so that the application of the electronic device is effectively widened, and the competitiveness is enhanced.

Description

[0001] 【Technical field】 [0002] The invention relates to the field of thin film technology, in particular to a method and device for polarizing a polymer thin film, a polarized film, and an electronic device. [0003] 【Background technique】 [0004] Polarization is an important step in the processing of thin film materials. The main purpose is to make the molecular dipole moments of disordered orientation in the thin film materials uniformly oriented along a specific direction (such as the direction of the polarized electric field), so that the thin film materials have piezoelectric properties. [0005] Thin-film polarization usually directly places the thin-film material between the electrodes, and uses the high-voltage electric field generated by the electrodes to complete the polarization. This method is very easy to break down the thin-film material. In particular, some polymer thin film materials are directly formed on the surface of electronic devices. Direct polarizati...

Claims

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Application Information

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IPC IPC(8): H01L41/257H01L41/08
CPCH10N30/045H10N30/704
Inventor 王开安
Owner 科锐昇微系统(苏州)有限公司
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