Vertical cavity surface laser emitter and manufacturing method thereof

Abstract

The invention discloses a vertical cavity surface laser emitter which comprises an active layer, a function assisting layer and a P-type DBR (Distributed Bragg Reflector) layer which are arranged in an overlapped manner, wherein the function assisting layer and the P-type DBR layer form a table surface structure; channels are formed inside the P-type DBR layer; the table surface structure is divided into a plurality of secondary table surface structures by the channels; P-surface electrodes in one-to-one correspondence to the secondary table surface structures are arranged at upper ends of the secondary table surface structures. Therefore, multiple waveguides can be formed by using the channels, carrier distribution and the waveguides can be associated, and furthermore the purposes that single mode output is independently controlled by a single electrode and a small deal of mode output is under hybrid control of multiple electrodes can be achieved. The invention further discloses a manufacturing method of the vertical cavity surface laser emitter. The table surface structure can be directly etched to form the channels, so that a novel mode control way can be achieved; in addition, as all modes are output on one same table surface, the modes can be directly coupled with optical fibers, and a multiplexer is not needed.

Description

technical field [0001] The invention relates to the field of semiconductor lasers, in particular to a vertical cavity surface emitting laser and a manufacturing method thereof. Background technique [0002] Vertical Cavity Surface Emitting Laser (VCSEL for short) is a new type of semiconductor laser whose laser emission direction is perpendicular to the chip surface. Compared with edge emitting laser (EEL for short), VCSEL has many advantages, including low threshold, good stability, long life, small divergence angle, round spot, high fiber coupling efficiency, high modulation rate, and easy two-dimensional integration Wait. Therefore, VCSEL has been widely used in various high-efficiency and high-speed optical communication networks as the main light source device. [0003] With the development of society, a large number of data communication services have emerged, and these new services have higher requirements for the speed and bandwidth of optical communication network...

AI Technical Summary

Problems solved by technology

However, as the carrier of optical communication, optical fiber has encountered a bottleneck in its development.

Each orthogonal mode in multimode fiber can be regarded as an independent channel, but too many modes will bring serious dispersion effects, which limits the communication performance of multimode fiber and makes it difficult to achieve long-distance transmission

For single-mode fiber, although its dispersion is small and ultra-long-distance transmission can be achieved, its multiplexing for time, frequency, polarization and other physical dimensions is approaching the Shannon limit

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