Unlock instant, AI-driven research and patent intelligence for your innovation.

Maglev planar rotating motor and photolithography device

A plane rotation and magnetic levitation technology, which is used in photoplate-making process exposure devices, holding devices with magnetic attraction or thrust, microlithography exposure equipment, etc. It can solve problems such as difficulty in meeting process requirements and inability to provide RZ degree of freedom rotation.

Active Publication Date: 2019-02-01
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For a newly proposed lithography process of rotation measurement and exposure, it is difficult to meet the new process requirements due to the inability to provide continuous, stable and high-speed rotation of the RZ degree of freedom

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Maglev planar rotating motor and photolithography device
  • Maglev planar rotating motor and photolithography device
  • Maglev planar rotating motor and photolithography device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] like image 3 and Figure 4 As shown, the magnetic levitation plane rotating electrical machine disclosed in this embodiment includes a stator and a mover. The stator includes a back iron 103 and a magnetic steel array 101; the mover includes a coil array and a peripheral frame of the coil array (not shown in the figure).

[0023] Specifically, the magnetic steel array 101 includes a number of radially annularly arranged sector magnets, the sector magnets include N-pole sector magnets, S-pole sector magnets and Halbach (Holbach) magnets, wherein the N-pole sector magnets The sector-shaped magnets and the S-pole sector-shaped magnets are arranged at intervals and connected end to end in a ring shape, and the Halbach magnets are arranged between the N-pole sector-shaped magnets and the S-pole sector-shaped magnets.

[0024] Please continue to refer to image 3 and Figure 4 , the coil array is composed of 3n (n is 1, 2, 3...) sector-shaped single-phase coils, and the ...

Embodiment 2

[0040] like Figure 9 As shown, the difference between this embodiment and Embodiment 1 is that this embodiment uses the magnetic steel array 101 as the mover and the coil array 102 as the stator.

[0041] Since the moving coil type may cause serious cable interference, the moving magnet type scheme is adopted, the coil array 102 is used as the stator, and the current of each phase is supplied with a certain regularity, so that the mover of the ring-shaped magnetic steel array 101 can realize the magnetic levitation rotate. This can not only eliminate cable interference, but also arrange single-phase coils more reasonably, which is suitable for heat dissipation.

[0042] To sum up, the present invention provides a magnetic levitation plane rotating motor and a lithography device. The magnetic levitation plane rotating motor includes: a back iron, a magnetic steel array mounted on the back iron, and a magnetic steel array corresponding to the magnetic steel array. A coil arra...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a maglev planar rotary motor and a lithographic apparatus. The maglev planar rotary motor comprises back iron, a magnet steel array installed on the back iron, and a coil array arranged corresponding to the magnet steel array. The magnet steel array includes a plurality of sector magnets in radial and ring-shaped arrangement. The coil array includes 3n hollow sector single-phase coils. The maglev planar rotary motor has as high precision as maglev linear and planar motors, and can rotate at any angle in the plane. Two or more single-phase coils in certain arrangement can be separately electrified, and different motion control at six degrees of freedom on the maglev planar rotary motor can be realized.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a magnetic levitation plane rotating motor and a lithography device. Background technique [0002] like figure 1 and figure 2 As shown, the magnetic levitation linear motor structure mainly includes: a stator back iron, a stator magnetic steel array located on the stator back iron, a mover coil arranged on the stator magnetic steel array, and a coil casing. The stator magnetic steel array is alternately arranged by magnets through N poles and S poles. If the three-phase coils in the mover coils are fed with alternating currents with the same amplitude and frequency at an electrical angle of 120°, the magnetic levitation line can be guaranteed. The motor outputs thrust in two degrees of freedom, horizontal and vertical, that is, magnetic levitation linear motion can be realized. [0003] The existing magnetic levitation plane motor can realize the magnetic levit...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H02N15/00G03F7/20
CPCG03F7/70716H02N15/00
Inventor 季汉川陈庆生卢诗良段素丙刘小虎胡兵
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD