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FAST-ICA algorithm-based ultrathin plate interference signal separating and processing method during wavelength phase-shifting process

A FAST-ICA, interference signal technology, applied in the field of optical detection

Inactive Publication Date: 2017-08-08
SHANGHAI UNIV
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Problems solved by technology

[0009] The purpose of the present invention is to provide an ultra-thin flat plate interference signal separation processing method based on the FAST-ICA algorithm in wavelength phase shifting in view of the fact that the existing wavelength phase shifting algorithm cannot separate the interference fringe information on the front and rear surfaces of the ultra-thin parallel plate. The ultra-thin parallel plate interference signal obtained by phase-shifting interferometry is introduced into the FAST-ICA algorithm, and the front and rear surface interference signals of the ultra-thin plate are separated by a fast iterative algorithm, and then the separated interference signal is processed by a time-domain phase-shifting algorithm to obtain the front and rear surfaces face shape information

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  • FAST-ICA algorithm-based ultrathin plate interference signal separating and processing method during wavelength phase-shifting process

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[0022] The present invention will be described below in conjunction with the accompanying drawings and preferred embodiments.

[0023] see figure 1 , the ultra-thin plate interference signal separation processing method based on the FAST-ICA algorithm in this wavelength phase shifting, firstly use the wavelength phase shifting interferometer to measure the ultra-thin parallel plate through wavelength tuning, and obtain a series of wavelength phase shifting information containing the front and rear surface shape information Interferogram. Then, the collected series of wavelength phase-shifting interference signals are de-averaged, and then the averaged interference signals are whitened by using a whitening matrix. In the next step, according to the independent component extraction algorithm, the separation matrix is ​​used to process the whitened mean signal. It is judged whether the separation matrix processes the mean signal after whitening to converge. If it converges, th...

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Abstract

The present invention relates to a FAST-ICA algorithm-based ultrathin plate interference signal separating and processing method during the wavelength phase-shifting process. According to the technical scheme of the invention, an ultrathin plate interference signal is obtained through the wavelength phase-shifting interference measurement, and then the FAST-ICA algorithm is introduced based on the blind signal separation technology. Through the fast iterative algorithm, interference fringes formed between the front and back surfaces of an ultrathin plate are separated. After that, separated interference fringes are processed through the time-domain phase-shifting algorithm. In this way, the surface shape information of the front and back surfaces of the ultrathin plate is obtained. The method mainly aims to process the stripe graph of the ultrathin plate during the wavelength phase-shifting process. Therefore, the method can be used for separating the information of the front and back surfaces of the ultrathin plate and realizes the separation and the measurement of the surface shapes of the front and back surfaces of the ultrathin plate.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to an ultra-thin flat plate interference signal separation and processing method based on the FAST-ICA algorithm in wavelength phase shifting. Background technique [0002] Phase-shifting interference technology can be divided into hardware phase-shifting technology represented by piezoelectric ceramics and wavelength phase-shifting technology in terms of implementation methods. Wavelength phase-shifting technology is also called quasi-software phase-shifting technology. When measuring parallel plates, the hardware phase-shifting technology cannot overcome the influence of parasitic fringes formed by the interference of the front and rear surfaces of the parallel plates. Measures such as smearing Vaseline are required to eliminate the parasitic fringes, but this will introduce errors to the measurement. The wavelength phase-shifting technology can overcome the above shortcomings, an...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B9/02G06F17/16
CPCG01B9/02083G01B11/2441G06F17/16
Inventor 孙涛董焰章于瀛洁牟柯冰
Owner SHANGHAI UNIV
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