A kind of method for preparing electronic grade dichlorodihydrogen silicon
A technology of dichlorodihydrosilane and electronic grade, which is applied in chemical instruments and methods, halosilanes, silicon compounds, etc., and can solve problems such as unstable product quality and high energy consumption
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Embodiment 1
[0030] use figure 1 The process shown, using figure 2 The device shown, the specific test parameters are listed in Table 1.
[0031] Table 1
[0032]
[0033] Under the above conditions, the purity of the product dichlorodihydrogen silicon reaches 9N, the B impurity content is 0.06ppb, the P impurity content is 0.08ppb, and the Al impurity content is 0.06ppb.
Embodiment 2
[0035] use figure 1 The process shown, using figure 2 The device shown, the specific test parameters are shown in Table 2.
[0036] Table 2
[0037]
[0038] Under the above conditions, the purity of the product dichlorodihydrosilane reaches 9N, the B impurity content is 0.02ppb, the P impurity content is 0.04ppb and the Al impurity is 0.04ppb.
Embodiment 3
[0040] use figure 1 The process shown, using figure 2 The device shown, the specific test parameters are shown in Table 3.
[0041] table 3
[0042]
[0043] Under the above conditions, the purity of the product dichlorodihydrosilane reaches 9N, the B impurity content is 0.01ppb, the P impurity content is 0.03ppb and the Al impurity is 0.03ppb.
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Abstract
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