Film thickness detection device and method
A detection device and a technology for film thickness, which are applied in measurement devices, electromagnetic measurement devices, and electrical devices, etc., can solve problems such as environmental interference of film thickness detection devices
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Embodiment 1
[0029] According to an aspect of an embodiment of the present invention, a film thickness detection device is provided, including: a common electrode, a detection electrode, a common electrode voltage generation circuit, a detection electrode signal processing circuit, the common electrode and the detection electrode are opposite in a first direction and The first common surface of the common electrode is opposite to the first detection surface of the detection electrode, and the detection channel of the film to be tested is formed between the first common surface and the first detection surface, wherein the common electrode voltage generation circuit is used for A voltage is generated on the electrode, so that an effective signal voltage is induced on the detection electrode; the detection electrode signal processing circuit includes: a reset voltage timing control circuit, a detection electrode effective signal voltage transfer timing control circuit and a differential amplifi...
Embodiment 2
[0044] According to another embodiment of the present invention, a method embodiment of a film thickness detection method is also provided. It should be noted that the steps shown in the flow chart of the accompanying drawings can be implemented in a computer system such as a set of computer-executable instructions and, although the logic sequence is shown in the flow chart, in some cases, the steps shown or described can be executed in a different order than here, and the film thickness detection method of the embodiment of the present invention can be used To implement the film thickness detection device provided by the embodiment of the present invention. The film thickness detection method provided by the embodiment of the present invention is introduced below.
[0045] In this embodiment, a film thickness detection method is provided, image 3 The flowchart of the film thickness detection method according to the embodiment of the present invention, such as image 3 As s...
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