Method of making inorganic thin-film transistor, and flexible display device

Abstract

The invention provides a method of making an inorganic thin-film transistor, comprising the following steps: sequentially forming a P-type semiconductor layer and an N-type semiconductor layer on a rigid substrate; forming a groove passing through the N-type semiconductor layer in the P-type semiconductor layer; forming a source and a drain at the two sides of the groove on the N-type semiconductor layer; transferring the P-type semiconductor layer, the N-type semiconductor layer, the source and the drain to a flexible substrate by means of turning transfer; sequentially forming a gate insulating layer and a gate on the P-type semiconductor layer; and forming a flat layer covering the gate on the gate insulating layer. The invention further provides a flexible display device of an inorganic thin-film transistor made using the method. An inorganic thin-film transistor which is applicable to a flexible display process and has good electrical property is prepared through a nano imprint method. By designing the structure of the inorganic thin-film transistor, a narrow-channel inorganic thin-film transistor device is obtained. The process requirement is lowered, and the cost is saved.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a method for manufacturing an inorganic thin film transistor used in a flexible display device and a flexible display device. Background technique [0002] Inorganic thin-film transistors (TFT for short) are superior to organic thin-film transistors in many aspects of electrical performance, but flexible electronics based on inorganic thin-film transistors are cumbersome, costly, and have poor device stability. Inorganic thin film transistors combined with nanoimprinting and transfer printing technologies can not only ensure high electron mobility and saturation velocity, but also bring flexibility and bending resistance close to organic thin film transistors. [0003] Therefore, it is necessary to provide a method for fabricating inorganic thin film transistors using nanoimprint and transfer printing techniques. Contents of the invention [0004] The invention pr...

AI Technical Summary

Problems solved by technology

[0002] Inorganic thin-film transistors (Thin-film transistor, referred to as TFT) are superior to organic thin-film transistors in many aspects of electrical performance, but the flexible electronics based on inorganic thin-film transistors is cumbersome, costly, and the device stability is poor

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