Fluid-enhanced dielectrophoretic single cell arrangement and control chip and making method thereof
A technology for controlling chips and single cells, applied in chemical instruments and methods, biochemical equipment and methods, biochemical instruments, etc., can solve the problems of high cost, low chip reliability, and difficult to release, and achieve easy control and flexible electrode structure. Variety of effects that are easy to corrode and form
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[0046] like figure 1 , 2 , 3, a fluid-enhanced dielectrophoresis single-cell array and control chip, the whole is a sandwich structure, composed of seven parts, from top to bottom are catheter joint 1, upper substrate 2, upper microelectrode 3, microchannel 4. The microwall array 5, the lower microelectrode 6 and the lower substrate 7; among them, the catheter joint 1 is a block structure made of polydimethylsiloxane PDMS, which is used for the injection and output of the experimental buffer; the upper Substrate 2 uses transparent glass with a thickness of 1.1mm as the base material of upper microelectrode 3; as Figure 4 , 5 As shown, the upper microelectrode 3 is made of ITO metal to form an integrated interdigital electrode; the microchannel 4 is made of PDMS film, and a channel structure including all array microwalls is cut out with a blade (such as Figure 8 shown); as Image 6 , 7 As shown, the micro-wall array 5 is a micron-scale circular deep hole, which is made ...
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