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Mask plate, mask plate manufacturing method, and vapor deposition apparatus

A manufacturing method and masking plate technology, which are applied in the field of evaporation devices and masking plates, can solve problems such as poor welding effect, difficult welding, and affecting the service life of masking plates, so as to improve welding effect, reduce welding difficulty, The effect of solid welding

Active Publication Date: 2020-02-04
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the related art, the mask bars of the mask board are usually welded to the mask frame by welding. However, the material and crystal structure of the mask bar and the mask frame are different, so welding is difficult and the welding effect is not good.
At the same time, the use environment of the mask plate is high vacuum and high temperature, and it will be exposed to various organic substances, acids, alkalis and other substances during use. Welding defects greatly affect the service life of the mask plate

Method used

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  • Mask plate, mask plate manufacturing method, and vapor deposition apparatus

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Embodiment Construction

[0027] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0028] In the description of the present invention, it should be understood that the features defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0029] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed c...

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Abstract

A mask plate, a method for fabricating the mask plate, and an evaporation device are disclosed. The mask plate comprises a mask frame and a mask strip. The mask frame comprises a transition layer on a first surface of the mask frame, and the mask strip is welded to the mask frame through the transition layer. In particular, a material of the transition layer is the same as that of the mask strip.

Description

technical field [0001] The invention relates to the field of evaporation technology, in particular to a mask, a method for manufacturing the mask, and an evaporation device. Background technique [0002] In the related art, the mask strips of the mask plate are usually welded to the mask frame by welding. However, the material and crystal structure of the mask strip and the mask frame are different, so welding is difficult and the welding effect is not good. At the same time, the use environment of the mask plate is high vacuum and high temperature, and it will be exposed to various organic substances, acids, alkalis and other substances during use. Welding defects greatly affect the service life of the mask plate. Contents of the invention [0003] The present application is made based on the inventor's discovery and recognition of the following facts and problems: the material and crystal structure of the mask strip and the mask frame are different, and welding is relati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24B23K26/211G03F1/38
Inventor 张文畅马超靳福江杨文斌曾望明王永茂黄世花
Owner BOE TECH GRP CO LTD