Detection device and method for judging and recording position of silicon wafers

Abstract

The invention discloses a detection device and method for judging and recording the position of silicon wafers, and belongs to the technical field of semiconductor carrying equipment. According to the invention, slots of a silicon wafer box are arranged in a trapezoidal manner, the upper end of the silicon wafer box is provided with an opening, the edge of a silicon wafer at each layer can be observed when the silicon wafers are seen from top to bottom, an infrared distance sensor is installed above the silicon wafer box, a signal transmitting path is along the vertical direction, an air cylinder drives the sensor to move in a straight line manner, a signal transmitting diode of the sensor transmits signals to the silicon wafers through the opening at the upper end of the silicon wafer box, the signals are reflected by the edge of the silicon wafer at each layer and received by a receiving diode, signals reflected by the silicon wafers located at different layers are different, the reflected signals are transmitted to an industrial control computer through an acquisition card, the industrial control computer performs analysis and classification on the acquired signals through software, and a manipulator performs process operations according to data of the industrial control computer. The detection device and method provide an experimental basis for recognition for the position of the silicon wafers and the operation reliability of the manipulator.

Description

technical field [0001] The invention relates to a detection device and method for distinguishing and recording the position of a silicon wafer, and specifically relates to the technical field of semiconductor handling equipment. Background technique [0002] Silicon wafers are widely used in semiconductor components, and their fineness represents the manufacturing process level of semiconductors. During the manufacturing process of silicon wafers, there are strict requirements on the environment, processing and carrying devices. Silicon wafers are generally stored in silicon wafers. In the box, the robotic arm will grab and carry the silicon wafers from the box for process processing. [0003] The silicon wafer box is generally placed vertically, and the front opening is used for the robot to grab and store the silicon wafer. There are layers of slots distributed in the silicon wafer box, and each slot places a silicon wafer. There are usually 25 slots in the box. The slots...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that traditional infrared scanning is prone to large errors in identifying the position of thin silicon wafers, the present invention provides a detection device and method for identifying and recording the position of silicon wafers. The technical solutions adopted are as follows:

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