Processing method of optical window of differential pressure environment
A processing method and technology of environmental optics, applied in optics, optical components, installation, etc., can solve problems such as optical window distortion and aberration, and achieve the effect of high surface shape accuracy, light weight and strong operability
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[0020] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0021] Such as figure 1 As shown, a method for processing an optical window in a differential pressure environment, the device used is mainly composed of: a sealed cavity 1, an optical window 2, an interferometer 3, an interface flange 4, an air extraction flange 5, and a standard reflector 6.
[0022] The method steps are as follows:
[0023] Step S1: The material of the optical window is fused silica, the diameter is 200mm, and the thickness is 15mm. It is divided into two sides, A and B. Firstly, the A side is processed to the required surface shape RMS<λ / 10 according to the conventional method, and then the B side is semi-finished. Surface shape RMS is 2.1λ;
[0024] Step S2: Design a sealed chamber with a flange, in which the suction flange is connected to the suction pump (working pressure range: 101325Pa~1×10 -2 Pa); the interface fla...
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