Error compensation system of grating ruler and method thereof

An error compensation and grating ruler technology, which is applied in the field of grating rulers, can solve problems such as poor accuracy of grating rulers, and achieve the effect of improving measurement accuracy

Pending Publication Date: 2017-09-15
ZHUHAI COLLEGE OF JILIN UNIV +1
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0007] The technical problem to be solved by the present in

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  • Error compensation system of grating ruler and method thereof
  • Error compensation system of grating ruler and method thereof
  • Error compensation system of grating ruler and method thereof

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Embodiment Construction

[0030] The present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0031] Such as figure 1 As shown, the present invention provides an error compensation system for a grating ruler, which includes a base, an air bearing sliding device and a laser interferometer.

[0032] The base includes a first platform 100 , a second platform 110 and a third platform 120 parallel to the top surface of the first platform 100 , and the top surface of the second platform 110 is provided with a grating scale 200 along its length direction.

[0033] The air bearing sliding device includes a half-enclosed slider 300 arranged on the outer peripheral surface of the third platform 120 and each air bearing block 400 arranged on the inner wall of the half-enclosed slider 300, and the half-enclosed slider 300 is under the action of the driving device, Drive each air-floating block 400 to do linear motion on the outer peripheral surface ...

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PUM

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Abstract

The invention discloses an error compensation system of a grating ruler and a method thereof. The error compensation system of the grating ruler comprises a pedestal, an air floatation slide apparatus and a laser interferometer. The pedestal comprises a first platform, a second platform and a third platform. A top surface of the second platform is provided with the grating ruler. The air floatation slide apparatus comprises a half-surrounded slide block and an air floatation block. A top surface of the half-surrounded slide block is provided with a grating ruler reading head. The laser interferometer comprises a laser head, a spectroscope and a reflective mirror arranged on a same horizontal surface. In the invention, K points are arranged in a stroke range of the grating ruler; the laser interferometer successively measures a distance between two adjacent points; simultaneously the grating ruler is used to measure the distance between the two adjacent points so as to acquire a measured value difference of the two, and error segmentation linearity fitting is performed so as to acquire a correction coefficient in the distance; then a correction coefficient in a whole stroke range is acquired and is output to subsequent electronic equipment; and then measurement precision of a grating line displacement measurement device is increased.

Description

technical field [0001] The invention relates to a grating ruler, in particular to an error compensation system and method for the grating ruler. Background technique [0002] In modern production and manufacturing, grating rulers have been widely used in various precision motion systems. In some mechanical processing that does not require high precision, such as the working process of ordinary roughing machine tools, low-precision grating rulers can meet the requirements; and Now, there are more and more devices that require precision processing, and the required precision is getting higher and higher, so more high-precision motion control systems are needed, such as semiconductor processing, IC packaging and other equipment that require high-precision gratings ruler. [0003] The currently used grating line displacement measurement device includes a scale grating, a scanning unit and a signal processing unit. The scanning unit and the scale grating are respectively fixed o...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02Y02P70/10
Inventor 张传敏黄志良张松涛
Owner ZHUHAI COLLEGE OF JILIN UNIV
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