Surface-acoustic-wave-based micro-position sensor

Abstract

The invention discloses a surface-acoustic-wave-based micro-position sensor comprising a square piezoelectric substrate (1). A first surface acoustic wave transmitter (2) and a first surface acoustic wave receiver (3) are arranged correspondingly at the inner walls of two side surfaces of the piezoelectric substrate (1) in a vertical direction; a second surface acoustic wave transmitter (4) and a second surface acoustic wave receiver (5) are arranged correspondingly at the inner walls of two side surfaces of the piezoelectric substrate (1) in a horizontal direction; and the first surface acoustic wave transmitter (2), the first surface acoustic wave receiver (3), the second surface acoustic wave transmitter (4) and the second surface acoustic wave receiver (5) are arranged at the four corners of the piezoelectric substrate (1). Reflecting gratings (6) are arranged at the inner walls of the four side surfaces of the piezoelectric substrate (1). The surface-acoustic-wave-based micro-position sensor is manufactured based on the surface acoustic wave transmitting and receiving principle and has advantages of small size, high sensitivity, and high measurement precision; and the noise influence on the sensor is eliminated.

Description

technical field [0001] The invention relates, in particular, to a micro position sensor based on surface acoustic waves. Background technique [0002] Surface acoustic wave (SAW) is a kind of sound wave whose energy is concentrated on the surface of the ground, which was accidentally discovered by the British physicist Rayleigh in the process of studying seismic waves in the 1880s. Surface acoustic wave is an elastic wave propagating on the shallow surface of solid. It has several modes, mainly including Rayleigh wave, Love wave, Lamb wave, B2G wave, leaky shear surface acoustic wave and quasi-longitudinal leaky fast surface acoustic wave mode. surface acoustic waves, etc. [0003] In 1965, American White and Waltermer published a paper entitled "A New Type of Surface Acoustic Wave Acoustic-Electrical Converter", which made a key breakthrough in surface acoustic wave technology. For the first time, the interdigital transducer IDT was used to excite SAW. Accelerated the dev...

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Problems solved by technology

At present, the micro position sensor based on SAW sensing method has not been reported

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