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A shaft sealing structure for semiconductor special equipment

A special equipment, shaft sealing technology, applied in mechanical equipment, engine seals, shafts and bearings, etc., can solve the problems of semiconductor equipment shaft seals, difficult to meet harsh working conditions, etc., to achieve corrosion prevention, shaft structure sealing Reliable, the effect of improving reliability

Active Publication Date: 2019-01-01
BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The traditional single sealing form is sometimes difficult to meet the harsh working conditions, and it is urgent to design a shaft sealing structure to solve the problem of semiconductor equipment shaft sealing

Method used

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  • A shaft sealing structure for semiconductor special equipment
  • A shaft sealing structure for semiconductor special equipment
  • A shaft sealing structure for semiconductor special equipment

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Embodiment Construction

[0027] A shaft sealing structure for special equipment for semiconductors according to the present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0028] The examples described here are specific specific implementations of the present invention, and are used to illustrate the concept of the present invention. They are all explanatory and exemplary, and should not be construed as limiting the implementation of the present invention and the scope of the present invention. In addition to the embodiments described here, those skilled in the art can also adopt other obvious technical solutions based on the claims of the application and the contents disclosed in the description, and these technical solutions include adopting any obvious changes made to the embodiments described here. Replacement and modified technical solutions.

[0029] The accompanying drawings in this specification are schematic diagrams, which ass...

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Abstract

The invention discloses a semiconductor special-purpose equipment shaft sealing structure. The semiconductor special-purpose equipment shaft sealing structure comprises an inlet dish installed on a transmission shaft and a sleeve dish arranged on the inlet dish in a sleeving mode. The contact parts of the transmission shaft, the inlet dish and the sleeve dish comprises a groove section and a spiral section. The upper part of the sleeve dish is provided with circumferential grooves. The inner side of the sleeve dish is provided with a special-shaped groove. The special-shaped groove on the sleeve dish and the groove section on the transmission shaft form an expansion cavity. The expansion cavity is filled with nitrogen to make the interior of the expansion cavity be positive pressure. The inner sides of the inlet dish and the sleeve dish and the spiral section form a throttle clearance used for hurling leaking liquid out. According to the semiconductor special-purpose equipment shaft sealing structure, multi-grade circumferential groove sealing and spiral sealing combining form sealing is adopted, the interior of the expansion cavity is filled with the nitrogen to keep the positive pressure, permeation of acidic alkaline gas and liquid is prevented, the reliability of the sealing is improved by the sealing structure , corrosion of the interior of shafting is prevented, and the service life of working of the shafting is prolonged.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a shaft sealing structure for special semiconductor equipment. Background technique [0002] The transmission shaft is the most common structure in machinery, and it is a key component for power transmission, guiding support and other functions. [0003] With the rapid development of modern industry, the requirements for the shaft structure are getting higher and higher, and the sealing performance is a big challenge to the shaft performance. However, in the field of semiconductors, which requires higher reliability and precision, the research on shaft sealing is the focus of this technical field. [0004] In the field of semiconductor special equipment, the working environment of the transmission shaft is relatively complicated. It is often in the harsh working conditions of corrosive gases and liquids such as strong acid and alkali, which directly affects the p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16J15/16F16J15/40F16C35/08
CPCF16C35/08F16J15/16F16J15/40
Inventor 郭春华刘永进侯为萍祝福生舒福璋
Owner BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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