Chip top protection layer integrity detection apparatus
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- TIANJIN UNIV
- Publication Date
- 2017-11-07
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Abstract
Description
technical field
[0001] The present invention relates to the field of chip anti-focused ion beam attack, and in particular to a chip top layer metal protection layer integrity detection structure based on a sigma-delta (Σ-Δ) modulator, specifically, a chip top layer protection layer integrity detection device and method. Background technique
[0002] Focused Ion beam (FIB) attacks can deliberately cut integrated circuit chips or modify the original metal wiring, making the chip run wrong, or making some security protection modules lose their functions. The test nodes of the internal circuit can also be made through the FIB, and then the micro-probes can be used to directly monitor the test nodes and read the routing information. Therefore, FIB attacks seriously threaten the information security of integrated circuits.
[0003] At present, the mainstream anti-attack method against FIB attacks is to use the top metal protection layer as the attack-aware structure. like figu...