Infrared sensor structure, preparation method and detection system
An infrared sensor and infrared detection technology, which is applied in the field of image sensors, can solve problems such as poor intuition, inability to display frequency signal strength, difficulty in observation and judgment, etc., to achieve intuitive observation and judgment, and improve sensitivity
Active Publication Date: 2017-11-10
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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[0002] The output signal of a conventional infrared sensor is a grayscale signal, which can only display the strength and weakness of the infrared absorption signal in a certain band, but cannot display the strength of a frequency signal in a certain band. At the same time, the output signal is a grayscale signal. Easy to be observed and judged intuitively by practical users
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[0036] According to the preparation method of an infrared sensor structure of the present invention, the detection units are sequentially prepared according to the height of the resonant cavity from low to high; the height of the resonant cavity is divided into N types, corresponding to N types of detection units; specifically including:
[0037] Prepare the first metal interconnection layer; the first metal is formed in the first metal interconnection layer on both sides of the area corresponding to the resonant cavity below the first type of detection unit;
[0038] The second layer of interlayer dielectric layer and the second layer of metal interconnection layer are formed on the surface of the first layer of metal interconnection layer, no metal is set in the resonant cavity area corresponding to the first type of detection unit, and the second layer of metal interconnection layer corresponding to the first type of detection unit A second metal is formed in the second meta...
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The invention provides an infrared sensor structure, a preparation method and a detection system. The infrared sensor structure is provided with a plurality of detection units. Each of the plurality of detection units is provided with a resonant cavity. The heights of the resonant cavities of at least one part of all the detection units are different from one another, so that the frequencies of the incident light absorbed by at least one part of the detection units are different from one another. According to the invention, light waves absorbed by the resonant cavities of different heights are different in length, so that the infrared incident light of different wave bands can be effectively detected in a targeted mode. The sensitivity of detection is improved. Moreover, a basic color is given to each detection unit in the infrared sensor structure, and then a color value corresponding to a final pixel is obtained according to the strength of a detected signal and the basic color. Therefore, the visual observation and judgment can be realized.
Description
technical field [0001] The invention relates to the technical field of image sensors, in particular to an infrared sensor structure and a preparation method thereof, and an infrared detection system. Background technique [0002] The output signal of a conventional infrared sensor is a grayscale signal, which can only display the strength and weakness of the infrared absorption signal in a certain band, but cannot display the strength of a frequency signal in a certain band. At the same time, the output signal is a grayscale signal. It is easy to be observed and judged intuitively by a practical person. Contents of the invention [0003] In order to overcome the above problems, the present invention aims to provide an infrared sensor structure and an infrared detection system, which can subdivide and detect targeted infrared light in each band, improve the detection sensitivity of infrared light in different bands, and can Visually observe the detection results. [0004]...
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IPC IPC(8): G01J5/00
CPCG01J5/00G01J2005/0077
Inventor 康晓旭
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT