Stress and temperature compensated hall sensor, and method

一种传感器、传感器信号的技术，应用在转换传感器输出、采用电/磁装置传递传感构件、仪器等方向，能够解决方法复杂等问题，达到高灵敏度、容易实现、多自由度的效果

Active Publication Date: 2017-11-17
MELEXIS ELECTRONIC TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Such a straightforward approach is very complex

Method used

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  • Stress and temperature compensated hall sensor, and method
  • Stress and temperature compensated hall sensor, and method
  • Stress and temperature compensated hall sensor, and method

Examples

Experimental program
Comparison scheme
Effect test

example 2

[0198] In a variation of Example 1, some coefficients are chosen to be equal to zero, resulting in fewer coefficients to be determined and stored and simpler equations to be solved. The equation system for the second example is:

[0199]

example 3

[0201] The third example is practically the same as the second example, but is formulated differently. The main reason for this example is to show that polynomial representations can also be used to represent "temperature-dependent coefficients". The set of equations [11], [12] can be rewritten as:

[0202]

[0203] or:

[0204]

[0205] where the values ​​of ε1 and ε2 are not constants, but are actually temperature-dependent values ​​ε1(T) and ε2(T), which can be stored in non-volatile memory as, for example, a list of values ​​representing a piecewise linear approximation .

[0206] A possible advantage of this formulation is that the system of equations [16], [17] can be "solved" again by an iterative process starting from Δσ iso and starting with a starting value of ΔT, determine ε 1 (T 0 ) and ε 2 (T 0 ) for corresponding values ​​(which are then considered temporary constants), solving the system of equations (with constant coefficients) to obtain a new set ...

example 4

[0209] As mentioned above, simpler variants can be formulated by setting certain values ​​to zero. For example, if the coefficient α of Example 2 (equations [12], [13]) 11 and beta 11 is also set to zero, the system of equations becomes:

[0210]

[0211] Even this simple set of equations can yield highly accurate results in an application to be discussed further, for compensating Hall sensor readings over a temperature range of about 0°C to about 140°C.

[0212] One advantage is that this equation is particularly easy to solve (e.g., by first eliminating the parameter Δσ iso , then solve the quadratic equation with a single variable ΔT, and then substitute ΔT into one of the equations to find Δσ iso ), but other methods of solving the system of equations can of course also be used. The simplicity of this solution combined with its high accuracy is a major advantage over prior art solutions.

[0213] II. Compensation for Temperature and Stress

[0214] The above descr...

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Abstract

An integrated semiconductor device (100, 200, 1500) for measuring a magnetic field, comprising: a Hall sensor (11), a first lateral isotropic sensor (21) having a first stress sensitivity (ss1) and a first temperature sensitivity (TS1), a second lateral isotropic sensor (31) having a second stress sensitivity (SS2) and a second temperature sensitivity (TS2), optional amplifying means (13), digitization means (14); and calculation means configured for calculating a stress and temperature compensated Hall value in the digital domain, based on a predefined formula which can be expressed as an n-th order polynomial in only two parameters ([delta][sigma]iso, [delta]T, V1 or V2). These parameters may be obtained directly from the sensor elements, or they may be calculated from a set of two simultaneous equations. A method of obtaining a Hall voltage signal, and compensating said signal for stress and temperature drift.

Description

technical field [0001] The present invention relates generally to the field of integrated Hall sensors and in particular to the field of integrated Hall sensors compensated for temperature and mechanical stress. The invention also relates to a method of compensating Hall sensor readings for both mechanical stress and temperature. Background technique [0002] The basic function of a Hall sensor is to measure the magnitude of a magnetic field based on the so-called "Hall effect", whereby a voltage is generated across a conductor (such as a conductive plate) when a current flows through it in the presence of a magnetic field . This phenomenon is well known in the art and thus requires no further explanation here. [0003] However, there are several issues related to the readings from Hall sensors: [0004] 1) The Hall voltage is usually very small (typically in the microvolt to millivolt range) and thus needs to be amplified, but both the Hall element and the amplifier may ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/14
CPCG01D5/142G01R33/0064G01R33/07G01R33/0082G01R33/0023
Inventor S·休伯 林登贝格尔S·法兰西斯
Owner MELEXIS ELECTRONIC TECH CO LTD
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