A piezoelectric driven two-degree-of-freedom decoupling micro-swing platform

Abstract

The invention discloses a piezoelectric-driven two-degrees-of-freedom decoupling slight swing platform. The piezoelectric-driven two-degrees-of-freedom decoupling slight swing platform comprises a base, a stand column, a decoupling hook hinge, an X-axis bridge type amplification mechanism, an X-axis piezoelectric ceramic driver, an X-axis pre-tightening bolt, an X-axis hook hinge, a Y-axis bridge type amplification mechanism, a Y-axis piezoelectric ceramic driver, a Y-axis pre-tightening bolt, a Y-axis hook hinge and a working platform. The X-axis bridge type amplification mechanism and the Y-axis bridge type amplification mechanism are mounted on the outer sides of the two sides of the base. The vertex distances of the X-axis bridge type amplification mechanism and the Y-axis bridge type amplification mechanism and the base are equal, the X-axis piezoelectric ceramic driver is mounted in the X-axis bridge type amplification mechanism through the X-axis pre-tightening bolt, and the Y-axis piezoelectric ceramic driver is mounted in the Y-axis bridge type amplification mechanism through the Y-axis pre-tightening bolt. Each of the X-axis bridge type amplification mechanism and the Y-axis bridge type amplification mechanism comprises flexible hinge mechanisms symmetrically arranged on the two sides of the X-axis piezoelectric ceramic driver or the Y-axis piezoelectric ceramic driver and a beam for connecting the bridge type flexible hinge mechanisms. The X-axis bridge type amplification mechanism is connected with the working platform through the X-axis hook hinge, and the Y-axis bridge type amplification mechanism is connected with the working platform through the Y-axis hook hinge. By the adoption of the piezoelectric-driven two-degrees-of-freedom decoupling slight swing platform, the two-degrees-of-freedom decoupling precision slight swing can be achieved.

Description

Technical field [0001] The invention belongs to the field of micro positioning, and specifically relates to a two-degree-of-freedom decoupling micro-swing platform directly driven by a piezoelectric ceramic driver. Background technique [0002] In recent years, with the development of bioengineering, materials science, and microelectronics technology, objects operated by micro-nano have become smaller and smaller, and the precision of micro-nano operations has become higher and higher. In order to ensure the precision of precision micro-nano operation, the small angle adjustment is particularly important. As an important part of the precision micro-nano operating system, the two-degree-of-freedom micro-swing platform plays a vital role in the micro-nano operation. The two-degree-of-freedom micro-swing platform can realize the small swing of the X-axis and the Y-axis, and is used to adjust the angle of the positioning platform during the micro-nano operation, thereby improving th...

AI Technical Summary

Problems solved by technology

At present, some scholars have designed a variety of micro-swing platforms that can realize two-degree-of-freedom swings, but these micro-swing platforms are mostly multi-degree-of-freedom platforms (the number of degrees of freedom is greater than 2), and their X-axis and Y-axis swing motions are coupled. Precise X-axis and Y-axis swings can only be achieved due to kinematic decoupling, which increases the difficulty of control

In addition, most of these platforms are assembled through assembly, and the motion accuracy of the platform is affected by the assembly accuracy, and the motion accuracy of the platform is not high; in addition, due to the high requirements for assembly accuracy, the processing cost of the platform is increased.

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