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Charged particle beam device and sample observation method

一种带电粒子束、电子束的技术，应用在电路、放电管、电气元件等方向，能够解决暗视野像取得变难等问题，达到结构以及效果明确的效果

Inactive Publication Date: 2017-11-28
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

On the other hand, these operating techniques are also one of the reasons that make it difficult to obtain darkfield images

Method used

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  • Charged particle beam device and sample observation method
  • Charged particle beam device and sample observation method
  • Charged particle beam device and sample observation method

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Embodiment 1

[0045] In this embodiment, an observation mode for automatically acquiring a dark-field image corresponding to an arbitrary diffraction point constituting a diffraction pattern will be described. In the observation of this example, a diffraction pattern and a transmission image were used. exist Figure 7 The shown diffraction pattern includes both transmitted and diffracted waves. Figure 7 The point C in corresponds to the transmitted wave, otherwise it is the diffracted wave. Observation images that are imaged using only diffracted waves are dark field images, and observation images that are imaged using only transmitted waves are bright field images. The dark field image and the bright field image are collectively referred to as the transmission image. The observation image is selected by selecting which diffraction point is transmitted by the objective diaphragm 106 .

[0046] Figure 8 as well as Figure 9 They are the darkfield images imaged by transmitting only th...

Embodiment 2

[0074] In the present embodiment, an observation mode for automatically acquiring a diffraction pattern corresponding to a partial region constituting a transmission image will be described. Such as figure 2 As shown, the transmission image imaged by the objective lens is partially formed in the region below the sample. A field-of-view diaphragm 107 is partially installed in this area. The field-limiting diaphragm 107 is used to obtain the diffraction pattern of a specific area of ​​the transmission image. In the diaphragm plate constituting the field-limiting diaphragm 107, with Figure 5 The aperture plate 150 shown is similarly provided with a plurality of holes with a diameter of about 0.1 μm to several 100 μm. By controlling the current flowing through the imaging lenses 110-113, it can be switched to enlarge the diffraction pattern formed directly under the sample and image it on the CCD camera 114, or to enlarge the TEM image formed by the objective lens and image i...

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Abstract

In a charged particle beam device, a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial range in the transmission image are easily and automatically captured. The charged particle beam device has: an image-capturing unit for forming an image of a sample; a diaphragm disposed in the image-capturing unit, a plurality of openings having different sizes for transmitting an electron beam from the sample being formed in the diaphragm; a movement unit for varying the position of the diaphragm; and a display unit for displaying the formed image, wherein when the operator selects, e.g., a diffraction spot (A) on the display unit, the movement unit moves the diaphragm from the positional relationship between the diaphragm and the image in accordance with the position of the diffraction spot (A).

Description

technical field [0001] The present invention relates to a charged particle beam device and a sample observation method using the device. Background technique [0002] Conventionally, in order to obtain an arbitrary dark-field image, difficult manipulation techniques such as adjusting the position of the diaphragm were required. On the other hand, these operating techniques are also one of the reasons that make it difficult to obtain darkfield images. [0003] prior art literature [0004] patent documents [0005] Patent Document 1: Japanese Patent Laid-Open No. 2009-110788 Contents of the invention [0006] The problem to be solved by the invention [0007] Hereinafter, a conventional procedure used to acquire a dark field image using a transmission electron microscope (hereinafter referred to as "TEM") will be described. After determining the observation area, the operator operates the imaging lens and switches the observation mode to the diffraction pattern observa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/26H01J37/09H01J37/295
CPCH01J37/09H01J37/26H01J37/295H01J2237/0455H01J37/224H01J37/265
Inventor 塙晓成菊池秀树谷口佳史矢口纪惠土桥高志渡边庆太郎玉置央和
Owner HITACHI HIGH-TECH CORP
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