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Apparatus for manufacturing shadow mask using laser patterning and method for manufacturing shadow mask using laser patterning

A shadow mask and patterning technology, which is applied in the manufacture/processing of organic light-emitting devices, manufacturing tools, laser welding equipment, etc., can solve the problems of mask depression, small shadow mask thickness, difficulty in controlling and processing metal films, etc. Achieve the effect of simplifying the manufacturing process, reducing the time spent, preventing the use and elimination of harmful chemicals

Active Publication Date: 2017-12-01
AP SYST INC
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Problems solved by technology

[0008] Currently, a metal film with a thickness of about 20 μm is used as a base, but it is difficult to control and handle such a metal film due to the small thickness of the shadow mask and the mask sinking during large-area processing

Method used

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  • Apparatus for manufacturing shadow mask using laser patterning and method for manufacturing shadow mask using laser patterning
  • Apparatus for manufacturing shadow mask using laser patterning and method for manufacturing shadow mask using laser patterning
  • Apparatus for manufacturing shadow mask using laser patterning and method for manufacturing shadow mask using laser patterning

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[0049] The present invention relates to a laser device that can use a mask projection optical system appropriately designed according to the size and gap of a desired pattern by directly forming a pixel-shaped pattern on a base without going through a series of processes. Create a shadow mask.

[0050] In addition, the present invention relates to a method of manufacturing a shadow mask by forming a fine mask pattern on a submount using a laser, which can simplify the manufacturing process by photolithography, as compared with the prior art method. Therefore, it is possible to reduce the time it takes to manufacture the shadow mask compared to the method of manufacturing the mask in the related art.

[0051] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. figure 1 is a plan view of a shadow mask fabricated by a method according to an embodiment of the invention, figure 2 yes figure 1 A cross-sectional ...

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Abstract

An apparatus and a method for manufacturing a shadow mask according to the present invention comprise: a step of positioning, on the top of a base, a masking part provided with a masking pattern which corresponds to a mask pattern to be manufactured; and a step of preparing, on the base, a mask pattern which corresponds to the masking pattern by irradiating a laser beam from the top of the masking part and treating the base with the laser beam, which has passed through the masking part, wherein a plurality of masking patterns are provided to have different widths, and the masking pattern of which the width is narrower towards the direction on which the base is positioned is provided so that the laser beam irradiated from the top of the masking part is irradiated on the base after passing through the plurality of masking patterns step by step. Moreover, the strength around a pattern is gradually adjusted using a phase shift mask and a slit mask, thereby enabling a taper-shaped process required for a deposition mask.

Description

technical field [0001] The present invention relates to an apparatus and method for manufacturing a shadow mask. More particularly, the present invention relates to an apparatus for manufacturing a shadow mask using a laser patterning technique that easily forms fine patterns and has a simple process, and a method of manufacturing a fine metal mask using laser patterning. Background technique [0002] The size of patterns used to manufacture flat panel displays has been increasingly reduced in response to the need for high resolution in flat panel displays such as LCDs (Liquid Crystal Displays) and OLEDs (Organic Light Emitting Devices). [0003] For example, organic light-emitting layers of R (red), G (green), and B (blue) need to be patterned in order to manufacture OLEDs, and by using fine patterns such as rectangles and Rhombus) deposition of shadow mask to form the pattern. That is, when the R, G, B organic light-emitting materials pass through the pattern of the shad...

Claims

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Application Information

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IPC IPC(8): B23K26/362B23K26/06B23K26/064B23K26/066B23K26/067
CPCB23K26/064B23K26/066B23K26/361B23K26/0648B23K26/0676H10K71/621H10K71/00H01L21/027H01L21/033H01L21/268H01L21/0275H01L21/0337
Inventor 朴钟甲金度勋金范相
Owner AP SYST INC
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