Storage system and storage system control method
A storage system and storage cabinet technology, applied in the field of storage system and control of the storage system, to achieve the effects of increasing accuracy and efficiency, reducing labor costs, and reducing collisions
Active Publication Date: 2020-08-25
TAIWAN SEMICON MFG CO LTD
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
Since the existing methods and plant equipment still do not fully meet the above-mentioned requirements for the management and storage of processing components, a new storage system is still needed to complete storage management with higher efficiency
Method used
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[0057] Several specific preferred embodiments will be cited below and described in detail with the accompanying drawings, which show several embodiments. However, the present invention can be implemented in many different forms, and is not limited to the embodiments described below. The embodiments provided here can make the invention more thorough and complete, so as to fully convey the scope of the present invention to those skilled in the art. By.
[0058] Moreover, for the convenience of description, spatially relative terms such as "under", "under", "lower", "over", "upper" and the like may be used herein to describe The relationship of one element or component to another (or other) elements or components. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially re...
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The invention provides a warehousing system. The warehousing system comprises a plurality of storage cabinets and a moving module, further comprises a grabbing module and a positioning module and in addition, comprises a control device; the storage cabinets and the moving module are arranged in a manner that the storage cabinets and the moving module can move in the direction of an X-axis; the storage cabinets are separately configured for storing at least one element; the moving module comprises a lifting platform capable of moving in the direction of a Z-axis and can be selectively arranged between every two adjacent storage cabinets; the grabbing module and the positioning module are arranged on the lifting platform; the grabbing module comprises a grabbing assembly used for grabbing the elements; the positioning module is used for detecting the position of the grabbing module relative to the storage cabinets; and the control device adjusts the operation of the warehousing system according to the detection signal from the positioning module. According to the warehousing system, bearing equipment can selectively enter the operation space between every two adjacent storage cabinets so as to grab the elements or place the elements into the storage cabinets.
Description
technical field [0001] The invention relates to a storage system and a method for controlling the storage system, in particular to a storage system for storing semiconductor processing equipment and a control method for the storage system. Background technique [0002] Semiconductor devices are used in various electronic applications such as personal computers, mobile phones, digital cameras, and other electronic equipment. The manufacture of semiconductor devices is usually by sequentially depositing insulating or dielectric layer materials, conductive layer materials and semiconductor layer materials on a semiconductor substrate, and then patterning the various material layers formed by lithography to form circuit components and parts on the semiconductor substrate. Technological advances in the materials of integrated circuits and their design have resulted in the development of multiple generations of integrated circuits. Each generation has smaller and more complex ci...
Claims
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IPC IPC(8): B65G1/137B65G1/04B65G1/10B65G47/90
CPCB65G1/0492B65G1/10B65G1/1373B65G47/902B65G2201/0214
Inventor 李建法黄俊荣刘旭水白峻荣郭守文
Owner TAIWAN SEMICON MFG CO LTD