Quality grading method and device based on PL detection
A grading and quality technology, applied in the field of data processing, can solve the problems of high-quality silicon wafers, failure to analyze silicon wafers, increase production costs, etc., and achieve the effect of avoiding waste
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Embodiment 1
[0040] figure 1 It is a flowchart of a quality classification method based on PL detection provided by Embodiment 1 of the present invention. The method is applicable to the situation of real-time detection of process slices in the process of process production, and the method can be implemented by a quality classification device based on PL detection provided by an embodiment of the present invention. The device can use software and / or hardware way, the device can be integrated in data acquisition or detection equipment, such as figure 1 As shown, the method specifically includes:
[0041] S110, perform analysis according to the photoluminescence detection result of the sample to obtain the quality parameter of the sample.
[0042] Exemplarily, when performing photoluminescence (Photoluminescence, PL) detection on a sample, a laser is usually used as an excitation light source to provide a photon of a certain energy to the sample. The electrons in the excited state belong ...
Embodiment 2
[0049] figure 2 It is a flowchart of a quality classification method based on PL detection provided by Embodiment 2 of the present invention. This embodiment is optimized on the basis of the above embodiments, and provides a preferred method of obtaining the sample detection results before analyzing the photoluminescence detection results of the samples to obtain the quality parameters of the samples, specifically: The sample is uniformly sampled according to a preset distance; according to the sampling result, photoluminescence detection is performed on the sample, and a corresponding detection result is generated. Such as figure 2 Shown:
[0050] Correspondingly, the method of this embodiment includes:
[0051] S210. Perform uniform sampling on the sample according to a preset distance;
[0052] S220. Perform photoluminescence detection on the sample according to the sampling result, and generate a corresponding detection result.
[0053] Exemplarily, for PL detection...
Embodiment 3
[0064] image 3 It is a flowchart of a quality classification method based on PL detection provided by Embodiment 3 of the present invention. This embodiment is optimized on the basis of the above embodiments, and provides a preferred specific method for obtaining the quality parameters of the sample by analyzing the photoluminescence detection results of the sample, specifically: obtaining the photoluminescence detection The lifetime curve and fluorescence spectrum of the non-equilibrium minority carriers of the sample described in the method; according to the lifetime curve and fluorescence spectrum of the non-equilibrium minority carriers, the quality parameters of the sample are analyzed. Such as image 3 Shown:
[0065] Correspondingly, the method of this embodiment includes:
[0066] S310. Obtain the lifetime curve and fluorescence spectrum of the non-equilibrium minority carriers of the sample in the photoluminescence detection;
[0067] S320. Analyze the quality pa...
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