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Quality grading method and device based on PL detection

A grading and quality technology, applied in the field of data processing, can solve the problems of high-quality silicon wafers, failure to analyze silicon wafers, increase production costs, etc., and achieve the effect of avoiding waste

Inactive Publication Date: 2017-12-15
CSI CELLS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, due to the high conversion efficiency of solar cells, it is necessary to have excellent silicon wafers and a good manufacturing process. However, the principle of EL in the existing technology can only analyze and detect the finished solar cells, and cannot detect the defects in the process. Process wafers and prepared silicon wafers are analyzed, so the existing technology cannot analyze high-quality silicon wafers before preparing solar cells, so as to increase the production cost

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  • Quality grading method and device based on PL detection
  • Quality grading method and device based on PL detection
  • Quality grading method and device based on PL detection

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Experimental program
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Effect test

Embodiment 1

[0040] figure 1 It is a flowchart of a quality classification method based on PL detection provided by Embodiment 1 of the present invention. The method is applicable to the situation of real-time detection of process slices in the process of process production, and the method can be implemented by a quality classification device based on PL detection provided by an embodiment of the present invention. The device can use software and / or hardware way, the device can be integrated in data acquisition or detection equipment, such as figure 1 As shown, the method specifically includes:

[0041] S110, perform analysis according to the photoluminescence detection result of the sample to obtain the quality parameter of the sample.

[0042] Exemplarily, when performing photoluminescence (Photoluminescence, PL) detection on a sample, a laser is usually used as an excitation light source to provide a photon of a certain energy to the sample. The electrons in the excited state belong ...

Embodiment 2

[0049] figure 2 It is a flowchart of a quality classification method based on PL detection provided by Embodiment 2 of the present invention. This embodiment is optimized on the basis of the above embodiments, and provides a preferred method of obtaining the sample detection results before analyzing the photoluminescence detection results of the samples to obtain the quality parameters of the samples, specifically: The sample is uniformly sampled according to a preset distance; according to the sampling result, photoluminescence detection is performed on the sample, and a corresponding detection result is generated. Such as figure 2 Shown:

[0050] Correspondingly, the method of this embodiment includes:

[0051] S210. Perform uniform sampling on the sample according to a preset distance;

[0052] S220. Perform photoluminescence detection on the sample according to the sampling result, and generate a corresponding detection result.

[0053] Exemplarily, for PL detection...

Embodiment 3

[0064] image 3 It is a flowchart of a quality classification method based on PL detection provided by Embodiment 3 of the present invention. This embodiment is optimized on the basis of the above embodiments, and provides a preferred specific method for obtaining the quality parameters of the sample by analyzing the photoluminescence detection results of the sample, specifically: obtaining the photoluminescence detection The lifetime curve and fluorescence spectrum of the non-equilibrium minority carriers of the sample described in the method; according to the lifetime curve and fluorescence spectrum of the non-equilibrium minority carriers, the quality parameters of the sample are analyzed. Such as image 3 Shown:

[0065] Correspondingly, the method of this embodiment includes:

[0066] S310. Obtain the lifetime curve and fluorescence spectrum of the non-equilibrium minority carriers of the sample in the photoluminescence detection;

[0067] S320. Analyze the quality pa...

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Abstract

Embodiments of the invention provide a quality grading method and device based on PL detection. The method includes the steps of conducting analysis according to a photoluminescence detection result of a sample to obtain a quality parameter of the sample; substituting the quality parameter of the sample into a quality function relationship of the sample, and calculating a quality factor of the sample; and grading the quality of the sample according to the quality factor of the sample. The quality grading method and the device based on PL detection provided by the embodiments of the invention obtain the quality parameter of the sample by analysis, then substitute the quality parameter of the sample into the quality function relationship related to the sample, calculate the quality factory of the sample, and grading the quality of the sample according to the quality factor, so that the real-time detection of a process piece during the technological processing is achieved in order to grade raw materials before the preparation of a finished product and the materials with good quality are selected to prepare the finished product to avoid the waste of processing cost.

Description

technical field [0001] The embodiments of the present invention relate to the technical field of data processing, and in particular, to a quality classification method and device based on PL detection. Background technique [0002] Photoluminescence (Photoluminescence, PL) is a phenomenon that depends on external light sources for irradiation, so that objects obtain energy, generate excitation and cause light emission. PL can detect the structure, composition and environmental atomic arrangement information of materials. It is a non-destructive and highly sensitive analysis method, so it is used in many fields. [0003] In the current situation where fossil fuels are decreasing day by day, solar energy has become one of the important energy sources available, and it is a renewable energy source with abundant resources. Generally, solar energy can be converted into thermal energy through photothermal conversion, and converted into electrical energy through photoelectric conv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66H01L31/18
CPCH01L22/12H01L31/1804Y02P70/50
Inventor 刘国李琰琪
Owner CSI CELLS CO LTD