An end gas path sealing device applied to an end-reversible wafer robot

Abstract

The invention discloses a tail end gas path sealing device applied to a tail end overturning wafer robot. A robot tail end is overturned through a motor synchronous belt. A sealing assembly tail end connecting flange is connected with an overturning gripper. A fixed pipe is connected with a gas path at the front end and fixed into a tail end shell through a flange. In the sealing process during wafer adsorption, a gas valve generates the negative pressure in a gas path, a cleaning chamber is in positive pressure relative to the gas path, at the time, an outer ring of a rubber sealing ring is pressed on the fixed pipe due to the inner and outer gas pressure difference, and accordingly a wafer can be adsorbed and grabbed through the gas path seal. Due to the fact that the seal is conducted through the inner and outer gas pressure difference, the gas path seal effect is completely not influenced during overturning action conducting. According to the gas path scheme, line twisting is avoided, the coaxial design of the overturning action and the vacuum generating action is achieved, and the processing cost is reduced to the great degree.

Description

technical field [0001] The invention discloses a reversible terminal air circuit sealing assembly applied to a wafer transfer robot, and belongs to the technical field of wafer robot design. Background technique [0002] During the processing of silicon wafers, many processing techniques require the flipping function of the robotic arm. Such as the wafer transfer robot invented by Kang Renke of Dalian University of Technology, patent number: ZL200420113013.1, publication number: CN2762970Y, authorized publication date: March 8, 2006. Its end turning mechanism is driven by a rotary cylinder. Patents applied by Beijing University of Technology: patent application number: CN201510121322.6, publication number: CN104723345B, authorized publication date: August 24, 2016. Driven by motor. However, no matter what kind of mechanical mechanism is used to realize the turning function, the sealing device of the turning mechanism is relatively complicated or uses an airtight sealed be...

AI Technical Summary

Problems solved by technology

However, no matter what kind of mechanical mechanism is used to realize the turning function, the sealing device of the turning mechanism is relatively complicated or uses airtight sealed bearings, and the cost is relatively high

Images