Vacuum furnace with higher safety for producing silicon bars

A vacuum furnace and safety technology, applied in the fields of silicon compounds, climate sustainability, sustainable manufacturing/processing, etc., can solve the problems of easy heat dissipation of vacuum furnaces, strong furnace pressure, and inability to dissipate heat, so as to prevent heat The effect of loss, good safety, easy maintenance and replacement

Inactive Publication Date: 2018-01-12
JIANGSU BINGCHEN TECH CO
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The object of the present invention is to provide a vacuum furnace for the production of silicon rods with better safety, so as to solve the problem that the heat of the vacuum furnace is easy to be lost in the above-mentioned background technology; Dangerous problems if too large

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  • Vacuum furnace with higher safety for producing silicon bars
  • Vacuum furnace with higher safety for producing silicon bars
  • Vacuum furnace with higher safety for producing silicon bars

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Embodiment Construction

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0017] see Figure 1-3 , the present invention provides a technical solution: a vacuum furnace for the production of silicon rods with better safety, including a vacuum furnace body 1, a temperature insulation sleeve 2, a vacuum layer 3, a fixing piece 4, a water cooling pipe 5, and a water pipe 6 , pressure relief port 7, fixed base 8, pressure inlet port 9, valve block 10, connecting cross bar 11, fixed sleeve 12, elastic component 13, support tube 14 and pr...

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Abstract

The invention discloses a vacuum furnace with higher safety for producing silicon bars. The vacuum furnace comprises a thermal insulation sleeve, a water-cooled tube, a pressure relief hole and a pressure discharging hole, wherein the thermal insulation sleeve is mounted on a vacuum furnace body, the water-cooled tube is mutually connected with the vacuum furnace body through a fixing component, the pressure relief hole is formed in the right side of the vacuum furnace body and is mutually connected with a fixing base, and a pressure feeding hole is formed in the left end of the fixing base; avalve block is arranged on the inner side of the fixing base, and the right side of the valve block is mutually connected with the sleeve through a connecting transverse rod; and an elastic componentis fixed in the fixing sleeve, a mounting cylinder is mounted outside the connecting transverse rod, and the pressure discharging hole is formed in the fixing base. According to the vacuum furnace with higher safety for producing the silicon bars, the heat loss can be effectively prevented, and the relatively good energy conservation and environment protection effects are achieved; and by utilizing the water-cooled tube, the vacuum furnace can be rapidly cooled and can be decompressed, so that the danger caused by an over-high pressure intensity is prevented, and the use is safer.

Description

technical field [0001] The invention relates to the technical field of vacuum furnaces, in particular to a vacuum furnace for silicon rod production with better safety. Background technique [0002] Vacuum furnace, that is, in the specific space of the furnace cavity, the vacuum system is used to discharge part of the material in the furnace cavity, so that the pressure in the furnace cavity is less than a standard atmospheric pressure, and the space in the furnace cavity achieves a vacuum state. This is a vacuum furnace. [0003] With the continuous development of industrial production technology, the application of vacuum furnaces in industrial production is becoming more and more mature. During the production of silicon rods, vacuum furnaces are required to process silicon rods, but the existing vacuum furnaces for silicon rod production are in When in use, the heat of the vacuum furnace is easy to lose; after the workpiece is processed, it is impossible to quickly dissip...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/021
CPCY02P20/10
Inventor 吕伟南
Owner JIANGSU BINGCHEN TECH CO
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