Ion fluorescence super-resolution imaging method
A super-resolution imaging and fluorescence technology, which is applied in the field of ion fluorescence super-resolution imaging, can solve the problems of poor resolution, cannot be achieved, and the imaging resolution cannot be better than 0.5 microns, and achieves the effect of high imaging resolution.
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[0020] Such as figure 1 As shown, the ion fluorescence super-resolution imaging method includes the following steps:
[0021] (1) Prepare the sample to be irradiated 3.
[0022] The thickness of the sample 3 to be irradiated matches the range of the incident ions therein, so that the ion beam can penetrate the sample. Samples can be microelectronic devices, solid materials or biological materials, etc.
[0023] (2) Fix the sample 3 to be irradiated on the sample stage, make the plane of the sample 3 to be irradiated perpendicular to the ion beam, and place the fluorescent target 4 behind the sample 3 to be irradiated and close to the sample 3 to be irradiated.
[0024] (3) The ion beam is irradiated to a random position 8 in the region of interest 2 of the sample in a random irradiation mode or a single ion control mode.
[0025] Among them: the random irradiation method means that the ion beam generated by the accelerator directly irradiates the sample, and the time for a ...
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