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A coupling device for water-guided laser processing with off-axis optical path

A laser processing and coupling device technology, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve problems such as broken nozzles, inability to conduct water-guided laser processing, inaccurate laser transmission efficiency in coupling alignment, etc., to achieve High-precision coupling alignment, improving mobile resolution, and solving the effect of reducing laser transmission efficiency

Active Publication Date: 2019-11-22
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, no matter which method is used, the size of the nozzle and the diameter of the laser beam waist are very small, belonging to the micron level, which puts forward high requirements on the accuracy and resolution of the mechanical moving platform, and the inaccuracy of the coupling alignment will affect the laser transmission efficiency. It will have a serious impact, and even break the nozzle, making it impossible to perform water-guided laser processing

Method used

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  • A coupling device for water-guided laser processing with off-axis optical path
  • A coupling device for water-guided laser processing with off-axis optical path
  • A coupling device for water-guided laser processing with off-axis optical path

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Experimental program
Comparison scheme
Effect test

Embodiment

[0045] Take a set of optical path parameters as an example, as shown in Table 1:

[0046] Table 1 Optical path parameters of the experimental device

[0047]

[0048] According to formula (1) ~ formula (3), program in matlab to get the change range of the X, Y direction of the waist position of the laser beam emitted by the second focusing lens relative to the position of the nozzle when the second focusing lens changes within the moving range, the first focusing When the lens changes within the moving range, the Z-direction change range of the waist position of the laser beam emitted by the second focusing lens relative to the position of the nozzle. The calculation results are shown in Figure 5, from Figure 5b It can be seen that the offset of the second focusing lens has a linear relationship with the radial offset of the beam waist, and its resolution is increased by about 5 times. Assuming that the original XY mobile platform has a minimum graduation of 10 μm and a m...

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Abstract

The invention provides a water-jet guided laser machining and coupling device of an off-axis light path. The water-jet guided laser machining and coupling device comprises a CCD, an imaging lens, a first focusing lens, a second focusing lens, water-proof glass, a nozzle, a laser device, a first focusing lens Z-direction moving mechanism, an X-Y moving platform and a coupling water cavity. In the laser light path, the two focusing lenses are used for focusing, the first focusing lens can be adjusted in the Z direction, and the second focusing lens and the nozzle are fixedly arranged in the coupling water cavity which is fixed to the X-Y moving platform, so that the first and second focusing lenses form an off-axis light path system. By means of the water-jet guided laser machining and coupling device, the displacement of a laser spot relative to the center of the nozzle can be smaller than the actual displacement of the moving platform, so that it is achieved that the moving division and the moving increment are further subdivided, which is very beneficial to the alignment of the micro-grade laser spot and the nozzle, and coupling alignment which is higher in precision can be achieved; meanwhile, the problem that in the prior art, due to the inaccuracy in the coupling alignment, the laser transmission efficiency is reduced is solved.

Description

technical field [0001] The invention relates to the technical field of water conduction laser processing, in particular to a water conduction laser coupling device. Background technique [0002] Water guide laser technology is a laser water jet composite processing method proposed by Dr. Bernold of Switzerland in 1993. In this method, the laser is introduced into the fine water column for cutting, and the fine water column can not only conduct the laser, but also cool the workpiece and remove the molten product. On the one hand, it inherits the advantages of laser cutting, such as no mechanical pressure, no workpiece deformation, no tool wear, and narrow incision width. And remelting, greatly improve the cutting quality. [0003] The core technology of the water-guided laser is the water-guided laser coupling device, whose main function is to generate a slender and stable water beam and couple the laser into the water beam. The coupling principle is to first focus the hig...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/00B23K26/064
CPCB23K26/0093B23K26/0648
Inventor 韩福柱孙冬
Owner TSINGHUA UNIV