A kind of excimer laser annealing ela process quality measurement method and system

Abstract

The invention relates to the technical field of ELA (excimer laser annealing) manufacturing process quality measurement, in particular to an ELA manufacturing process quality measuring method and system. A graduated scale is arranged under an ELA device, so that linear laser output by the ELA device falls onto the scales of the graduated scale; the scales on the graduated scale are vertical to thelinear laser; optical signals generated by irradiating laser onto the graduated scale are collected; the optical signals are displayed and output; electric signals are observed and measured for a period of time; whether the output laser is stable or not is judged according to the abnormality of the electric signals. The ELA manufacturing process quality measuring method and system have the advantages that the cost is low; whether the output laser is stable or not can be judged; factors causing the instability of the output laser can also be judged.

Description

technical field [0001] The invention relates to the technical field of ELA process quality measurement, in particular to an excimer laser annealing ELA process quality measurement method and system. Background technique [0002] ELA (Excimer Laser Annel excimer laser annealing) MURA is a defect that occurs frequently and has a large impact in the AMOLED process. Once it occurs, it is often accompanied by a large number of abnormal products in the online process. ELA MURA is generally only discovered during the lighting test of the back-end module. From the occurrence It took more than 10 days to discover, resulting in a high risk of defective products. Usually the instability of laser output is the main factor leading to ELA MURA. In order to detect ELA MURA during the ELA process, it is necessary to detect the output laser. [0003] The conventional detection method is to judge by personnel or to use an optical detection machine to detect. Among them, there is no uniform ...

AI Technical Summary

Problems solved by technology

Among them, there is no uniform quantification standard for personnel judgment, which has high requirements on the eyesight and experience of inspectors, and is inefficient

Although the detection efficiency of optical detection machine is higher than that of manual detection, the cost of optical detection machine is high, and it can only detect whether the output laser is stable, and cannot judge the factors that cause the output laser to be unstable.

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