Force sensor array
A sensor array and sensor technology, applied in the field of sensors, can solve problems such as easy cracking of silicon films
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Embodiment 1
[0025] like figure 1 As shown, a force sensor array includes: a casing 1, a circuit board 2, several gas pressure sensors 3 and an energy-absorbing film layer 4, a groove 5 is provided on the casing 1, and the circuit board 2 passes through The column 6 is suspended at the bottom of the groove 5 , the pressure sensors 3 are arranged in an array on the circuit board 2 , and the energy absorbing film layer 4 covers the gas nozzle of the gas pressure sensor 3 .
[0026] Wherein, the gas pressure sensor 3 is a plane pressure sensor, and the circuit board 2 is provided with an air flow hole 7 corresponding to the gas nozzle, so as to improve the detection accuracy.
[0027] The energy-absorbing film layer 4 is a flexible film, which has a certain elastic deformation ability, and can convert impact kinetic energy into heat energy, and has strong impact resistance. In this embodiment, it is preferred that the energy absorbing film layer adopts a nanoporous material energy absorbing ...
Embodiment 2
[0030] like figure 2 As shown, the structure of a force sensor array provided in this embodiment is basically the same as that of the first embodiment, the difference is that the casing is cancelled, and a protruding gas nozzle is provided above the gas pressure sensor 3, and each gas pressure The sensor 3 is enclosed in a gel matrix 8 .
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