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Scanning electron microscope sample table for air or moisture-sensitive sample and sample preparation method

A scanning electron microscope, sample stage technology, applied in material analysis using wave/particle radiation, material analysis using measurement of secondary emissions, circuits, etc. To achieve the effect of convenient operation, wide applicability and simple structure

Inactive Publication Date: 2018-03-06
WANXIANG 123 CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage is that this method still needs to open the sample chamber that has been replaced with gas, there will be a short air exposure time, and an inert gas needs to be added, which has high operating costs

Method used

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  • Scanning electron microscope sample table for air or moisture-sensitive sample and sample preparation method
  • Scanning electron microscope sample table for air or moisture-sensitive sample and sample preparation method

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Embodiment Construction

[0024] The technical solutions of the present invention will be further specifically described below through the embodiments and in conjunction with the accompanying drawings. For the convenience of description, the description below will be made with the cover closed on the base and the person standing on the side away from the hinge shaft of the cover and the base looking at the sample stage of the scanning electron microscope.

[0025] An example of a SEM sample stage for air or moisture sensitive samples:

[0026] Such as figure 1 , figure 2 As shown, a scanning electron microscope sample stage for air or moisture-sensitive samples includes a base 1, a gland 2, a sealing ring 10, a sample plate 3, left and right torsion springs 13, and a torsion spring fixture 11; the base 1 The rear end of the base is higher than the front end [In addition, in addition to the scheme that the rear end of the base is higher than the front end, the rear end of the gland can also be lower ...

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Abstract

The invention discloses a scanning electron microscope sample table for an air or moisture-sensitive sample. The scanning electron microscope sample table comprises a base, a gland, a seal ring, a sample plate, torsional springs, torsional spring fixing parts, a top plate, a connection seat, a shaft, bearings and torsional spring pressure plates. A to-be-scanned air or moisture-sensitive sample issealed on the sample plate in a glove box under the protection of an inert gas and then transferred to a scanning electron microscope sample room to be scanned and observed. A sample preparation method for a scanning electron microscope for the air or moisture-sensitive sample comprises the following steps of (1) putting the sample on the sample plate under the protection of the inert gas, covering the sample with the gland and sealing the sample into a low-pressure space enclosed by the base, the gland and the seal ring; (2) transferring the sample table to the scanning electron microscope sample room and vacuumizing the sample room; (3) opening the gland under the action of the torsional springs and vacuumizing the scanning electron microscope; and (4) observing, recording and analyzingthe sample and drawing a conclusion.

Description

technical field [0001] The invention relates to a scanning electron microscope sample stage and a sample preparation method of a product, in particular to a scanning electron microscope sample stage and a sample preparation method for air or moisture sensitive samples. Background technique [0002] Scanning electron microscope (scanning electron microscope for short) uses high-energy focused electron beams to scan the surface of the sample to excite physical information such as secondary electrons, backscattered electrons, and characteristic X-rays. By accepting, amplifying, and displaying these physical information, it obtains Advanced analysis and testing methods for information such as sample surface morphology and surface element distribution. The scanning electron microscope has the advantages of high magnification, high resolution, simple sample preparation, strong comprehensive analysis ability, and can carry out micro-region composition analysis with energy spectrome...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20G01N23/22
CPCH01J37/20G01N23/2202
Inventor 王军华郭茂根郑利锋蒋伟朱春梅张娟
Owner WANXIANG 123 CO LTD
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