High-precision supporting mask plate

Abstract

The invention discloses a high-precision supporting mask plate. The high-precision supporting mask plate comprises a plate frame, a plurality of strip-shaped mask sheets and a supporting membrane net.The plurality of strip-shaped mask sheets are closely arranged in sequence in the longitudinal direction. A splicing gap is formed between every two adjacent strip-shaped mask sheets. Each strip-shaped mask sheet extends in the transverse direction, and the two ends of each strip-shaped mask sheet are welded to the top faces of the plate frame. Each strip-shaped mask sheet is provided with at least one mask pattern. The supporting membrane net is located below the plurality of strip-shaped mask sheets and is fixed to the plate frame. The supporting membrane net is used for supporting the plurality of strip-shaped mask sheets and covering all the splicing gaps without blocking the mask patterns. The high-precision supporting mask plate provided by the embodiment of the invention can meet the requirements for film coating of large-size glass substrates, achieve mass production and improve the production efficiency and can also meet the requirements for the yield and precision of displayers in the mass production process. Besides, the service life of the high-precision supporting mask plate is long, and the cost of a user side is low.

Description

technical field [0001] The invention relates to a mask, in particular to a high-precision supporting mask. Background technique [0002] An organic light emitting diode (Organic Light Emitting Diode, OLED) display is a self-luminous display device. Due to its advantages of low power consumption, high display brightness, wide viewing angle and fast response speed, OLED displays are becoming more and more popular in the market. [0003] In the manufacturing technology of OLED displays, the mask plate technology in vacuum evaporation (such as fine metal mask sheet (Fine Metal Mask Sheet, FMM Sheet)) is a very important and key technology, which directly affects the quality and quality of OLED products. manufacturing cost. Generally, there is at least one mask pattern on the mask plate, and for mass production and processing, the mask patterns on the mask plate are multiple and distributed in a matrix. When the mask plate is used for coating processing, use these masks The pa...

AI Technical Summary

Problems solved by technology

[0004] The larger the size of the mask plate, the larger the size of the glass substrate can be coated, and the larger the number of display devices processed in each mass production, but the larger the size of the mask plate, the more difficult it is to control the precision, resulting in the display of production processing. The accuracy and resolution of the device cannot meet the expected requirements, and the defective rate is high

At the same time, because the size of the mask had to be reduced under the premise of ensuring the accuracy, the corresponding production efficiency decreased

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