Magnetron

Abstract

A magnetron includes an anode cylinder extending in a cylindrical shape along a central axis and a plurality of plate-like vanes at least each one end of which is fixed to the anode cylinder, extending from an inner face of the anode cylinder toward the central axis, in which the anode cylinder includes refrigerant flow paths for directly applying a refrigerant to the plate-like vanes. The refrigerant flow paths 111 are openings formed so that end surfaces (joint end faces of the plate-like vanes) of the plate-like vanes are exposed, which allow the refrigerant to directly contact the plate-like vanes.

Description

technical field [0001] The present invention relates to magnetrons as electron tubes for generating microwaves. Background technique [0002] In general, magnetrons are widely used in the fields of radar equipment, medical equipment, cookers such as high-frequency electronic food heaters, semiconductor manufacturing equipment, and other microwave-applied equipment because they can efficiently generate high-frequency output. High-output microwaves are required for use in semiconductor devices or industrial heating. In this case, it is necessary to improve the cooling performance of the magnetron according to the output of the microwave, and it is necessary to enlarge the cooling capacity. However, an increase in cooling capacity involves an increase in the size of the magnetron, resulting in an increase in the housing space for the magnetron and an increase in the size of the device itself. Therefore, a small magnetron with an excellent cooling structure is required. [000...

AI Technical Summary

Problems solved by technology

However, the increase in cooling capacity involves an increase in the size of the magnetron, which leads to an increase in the housing space of the magnetron and an increase in the size of the device itself. Therefore, a small magnetron with a cooling structure with excellent performance is required.

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