Axisymmetric silicon micromechanical gyroscope sensitive structure and manufacturing method thereof

A silicon micromechanical and sensitive structure technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, measuring device, etc., can solve the problems of severe structural coupling, asymmetric motion of the mass block support beam, etc., and achieve reduction Effects of stress concentration, improvement of mechanical sensitivity, and high sensitivity

Active Publication Date: 2018-05-08
湖南天羿领航科技有限公司
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  • Abstract
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  • Claims
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Problems solved by technology

[0004] At present, the research and development units of micro-mechanical gyroscopes adopting flat capacitive structure at home and abroad are mainly Norwegian sensonor company. The sensitive structure of this type of micro-mechanical gyroscope published by it

Method used

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  • Axisymmetric silicon micromechanical gyroscope sensitive structure and manufacturing method thereof
  • Axisymmetric silicon micromechanical gyroscope sensitive structure and manufacturing method thereof
  • Axisymmetric silicon micromechanical gyroscope sensitive structure and manufacturing method thereof

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Embodiment Construction

[0034] Such as figure 1 As shown, the sensitive structure of the axisymmetric silicon micromachined gyroscope in this embodiment includes an elastic frame 1 made of silicon wafers. The two sides of the elastic frame 1 are provided with bonded anchor points 2 arranged symmetrically, and the elastic frame 1 is provided with axisymmetric The through-hole area, and the symmetry axis of the through-hole area is provided with an "H"-shaped support beam 3, and two sides of the "H"-shaped support beam 3 are respectively provided with two axisymmetric shafts relative to the "H"-shaped support beam 3. Two sensitive mass blocks 4 (as movable capacitor plates), and the sensitive mass blocks 4 are arranged in the through-hole area and one side is connected to the "H"-shaped support beam 3 through the connecting beam 5 . In this embodiment, the elastic frame 1 is used as the stress release structure in the structural design of the micro-gyroscope. The elastic frame 1 is cleverly designed an...

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Abstract

The invention discloses an axisymmetric silicon micromechanical gyroscope sensitive structure and a manufacturing method thereof, wherein the sensitive structure comprises an elastic frame with bonding anchor points on both sides, an axisymmetric through-hole region is arranged on the elastic frame and 'H'-shaped supporting beams are arranged on the symmetric axis of the axisymmetric through-holeregion, two axisymmetric sensitive mass blocks are arranged on each of two sides of each 'H'-shaped supporting beam, and are arranged in the through-hole region, and one side of each sensitive mass block is connected with the corresponding 'H'-shaped supporting beam through a coupling beam; the manufacturing method comprises the step of using a wet-dry combination method to prepare the sensitive structure on a single silicon wafer. The axisymmetric silicon micromechanical gyroscope sensitive structure disclosed by the invention realizes complete axisymmetric distribution, reduces the loss, decreases the stress concentration, lowers the motion coupling, and improves the mechanical sensitivity; the manufacturing method disclosed by the invention has the advantages of simple processing technology, high processing quality, high structural robustness, high stability, wide application range and the like.

Description

technical field [0001] The invention relates to a micro-electromechanical system and sensor technology, in particular to an axisymmetric silicon micro-mechanical gyro sensitive structure and a manufacturing method thereof. Background technique [0002] The gyroscope is a sensor for measuring the angular motion of the carrier. It is the core device in the fields of attitude measurement and inertial navigation. Very important application value. Gyroscopes based on micro-electromechanical systems (MEMS) technology have significant features such as small size, low cost, low power consumption, long life, and mass production. The scope of application continues to expand and the value of application continues to increase. [0003] Micromechanical gyroscopes can be divided into capacitive, piezoelectric, resistive, resonant, tunneling, etc. according to the detection method. Capacitive micromachined gyroscopes can be divided into comb-tooth and flat-plate structures according to t...

Claims

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Application Information

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IPC IPC(8): G01C19/5656G01C19/5663
CPCG01C19/5656G01C19/5663
Inventor 朱新建马格林张旭虢晓双
Owner 湖南天羿领航科技有限公司
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