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Glass substrate thinned etching solution

A glass substrate and etching solution technology, which is applied in the field of glass substrate thinning production, can solve the problems of high toxicity, high risk, and environmental pollution of hydrofluoric acid, improve the etching rate and etching effect, reduce toxicity, and meet etching requirements Effect

Inactive Publication Date: 2018-05-15
天津美泰真空技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the thinning etchant substrates used all use hydrofluoric acid as the main component, but hydrofluoric acid is highly toxic and volatile, especially when it needs to be prepared at a higher temperature and concentration, not only the production process High risk, and will cause huge pollution to the environment

Method used

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  • Glass substrate thinned etching solution
  • Glass substrate thinned etching solution
  • Glass substrate thinned etching solution

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A glass substrate thinning etchant, which is prepared from raw materials comprising the weight percentages shown in Table 1:

[0021] The formula of the etching solution of table 1 embodiment 1

[0022]

Embodiment 2

[0024] A glass substrate thinning etching solution, which is prepared from raw materials including the weight percentages shown in Table 2:

[0025] The formula of the etching solution of table 2 embodiment 2

[0026]

Embodiment 3

[0028] A glass substrate thinning etching solution, which is prepared from raw materials including the weight percentages shown in Table 3:

[0029] The formula of the etching solution of table 3 embodiment 3

[0030]

[0031]

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PUM

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Abstract

The invention provides a glass substrate thinned etching solution. The etching solution is prepared from the following raw materials in percent by weight: 10-20% of tetrabutylammonium fluoride, 1-10%of organic acid, 1-10% of inorganic acid, 1-7% of a metal chelating agent, 1-5% of a surfactant, 1-2% of polyvinyl alcohol (PVA) and the balance of water. The glass substrate thinned etching solutionhas the advantages that by optimizing the formula, the tetrabutylammonium fluoride provides F<->, and the organic acid and the inorganic acid can provide H<+>, so that the glass etching effect is achieved and the use of hydrofluoric acid is avoided.

Description

technical field [0001] The invention relates to the technical field of glass substrate thinning production, in particular to an etchant for thinning a glass substrate. Background technique [0002] In the field of flat panel display, including plasma display, touch screen, liquid crystal display and other manufacturing processes, in order to further reduce the weight of display devices, more and more manufacturers adopt the method of thinning the glass substrate. There are usually two methods for glass substrate thinning, one is physical polishing and grinding, and the other is chemical etching thinning, among which chemical etching thinning is the most widely used. At present, the thinning etchant substrates used all use hydrofluoric acid as the main component, but hydrofluoric acid is highly toxic and volatile, especially when it needs to be prepared at a higher temperature and concentration, not only the production process The risk is high, and it will cause huge polluti...

Claims

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Application Information

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IPC IPC(8): C03C15/00
CPCC03C15/00
Inventor 张杰沈励郑建军姚仕军夏伟吴青肖
Owner 天津美泰真空技术有限公司
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