Equipment safety monitoring system and method

A safety monitoring and equipment technology, applied in general control systems, control/regulation systems, comprehensive factory control, etc., can solve problems such as loss, inability to respond to equipment safety conditions in real time, waste of manpower and material resources, and improve production utilization. , Efficient monitoring of equipment safety, saving manpower and material resources

Active Publication Date: 2018-05-22
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is a certain lag in this method, and it cannot reflect the safety status of the equipment in real time. If there is a hidden danger in the equipment, it will cause great losses during the detection period.
And separate personnel are required to operate, which will cause waste in manpower and material resources

Method used

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  • Equipment safety monitoring system and method
  • Equipment safety monitoring system and method

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Embodiment Construction

[0031] The equipment safety monitoring system and method of the present invention will be described in more detail below in conjunction with schematic diagrams, wherein a preferred embodiment of the present invention is shown, it should be understood that those skilled in the art can modify the present invention described here, and still realize the present invention Favorable effect. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

[0032] In the following paragraphs the invention is described more specifically by way of example with reference to the accompanying drawings. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodime...

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Abstract

The invention reveals an equipment safety monitoring system and method. The system provided by the invention comprises an equipment setting module which is used for monitoring the abnormal motion of equipment; an equipment sampling module which is used for outputting a reference processing curve and a reference fitting degree value of the equipment, wherein the reference processing curve is combined with a real-time processing curve so as to obtain a real-time fitting degree value; executing the dynamic sampling operation according to the sizes of the reference fitting degree value and the real-time fitting degree value and an abnormal motion; a technological analysis module which is used for analyzing the abnormal motion of the equipment and providing an improved motion; and an equipmentimproving module which is used for combining with the improved motion to maintain the equipment according to the change of the dynamic sampling. Through the cooperation of the four parts, the system achieves the real-time feedback of information, avoids the hysteresis of the discovery of a fault of the equipment, and improves the utilization rate of the equipment.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an equipment safety monitoring system and method. Background technique [0002] Today's semiconductor manufacturing industry is developing more and more rapidly. With the various technological needs of customers, the complexity and diversity of the manufacturing process continue to increase, and the competitive pressure among enterprises is increasing. According to customer requirements, high-quality and efficient The production of semiconductors is getting more and more attention from the semiconductor manufacturing industry. In the case of a certain production cost and factory scale, adopting a more reasonable and effective equipment process monitoring method can better monitor the safety status of the equipment and improve the utilization efficiency of the equipment. [0003] The current monitoring method of equipment in the semiconductor manufacturing industry is gene...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCG05B19/4185G05B2219/31088Y02P90/02
Inventor 宋鑫钊黄晶姚鹏
Owner SEMICON MFG INT (SHANGHAI) CORP
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